1/4/2011	7:51:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/4/2011	7:51:51 AM	Recipe started at 7:51 AM
1/4/2011	7:51:51 AM	H2 valve closed
1/4/2011	7:51:51 AM	BCl3 valve closed
1/4/2011	7:51:51 AM	PH3 valve closed
1/4/2011	7:51:51 AM	SiCl4 pre valve closed
1/4/2011	7:51:51 AM	SiCl4 post valve closed
1/4/2011	7:51:51 AM	Main Vac valve closed
1/4/2011	7:51:51 AM	Bypass valve closed
1/4/2011	7:51:51 AM	Bubbler valve closed
1/4/2011	7:51:51 AM	Helium valve opened
1/4/2011	7:51:51 AM	Helium MFC set to  500.000000
1/4/2011	7:51:51 AM	H2 MFC set to  0.000000
1/4/2011	7:51:51 AM	BCl3 MFC set to  0.000000
1/4/2011	7:51:51 AM	PHl3 MFC set to  0.000000
1/4/2011	7:51:51 AM	SiCl4 MFC set to  0.000000
1/4/2011	7:51:51 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	7:51:51 AM	Tube furnace set to 0
1/4/2011	7:53:12 AM	Helium valve closed
1/4/2011	7:53:12 AM	H2 valve closed
1/4/2011	7:53:12 AM	BCl3 valve closed
1/4/2011	7:53:12 AM	PH3 valve closed
1/4/2011	7:53:12 AM	SiCl4 pre valve closed
1/4/2011	7:53:12 AM	SiCl4 post valve closed
1/4/2011	7:53:12 AM	Main Vac valve closed
1/4/2011	7:53:12 AM	Bypass valve closed
1/4/2011	7:53:12 AM	Bubbler valve closed
1/4/2011	7:53:12 AM	Helium MFC set to  0.000000
1/4/2011	7:53:12 AM	H2 MFC set to  0.000000
1/4/2011	7:53:12 AM	BCl3 MFC set to  0.000000
1/4/2011	7:53:12 AM	PHl3 MFC set to  0.000000
1/4/2011	7:53:12 AM	SiCl4 MFC set to  0.000000
1/4/2011	7:53:12 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	7:53:12 AM	Tube furnace set to 0
1/4/2011	7:53:12 AM	Run finished at 7:53 AM
1/4/2011	7:53:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/4/2011	8:02:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2011	8:02:11 AM	Recipe started at 8:02 AM
1/4/2011	8:02:11 AM	Helium valve closed
1/4/2011	8:02:11 AM	H2 valve closed
1/4/2011	8:02:11 AM	BCl3 valve closed
1/4/2011	8:02:11 AM	PH3 valve closed
1/4/2011	8:02:11 AM	SiCl4 pre valve closed
1/4/2011	8:02:11 AM	SiCl4 post valve closed
1/4/2011	8:02:11 AM	Main Vac valve closed
1/4/2011	8:02:11 AM	Bubbler valve closed
1/4/2011	8:02:11 AM	Bypass valve opened
1/4/2011	8:02:11 AM	Helium MFC set to  0.000000
1/4/2011	8:02:11 AM	H2 MFC set to  0.000000
1/4/2011	8:02:11 AM	BCl3 MFC set to  0.000000
1/4/2011	8:02:11 AM	PHl3 MFC set to  0.000000
1/4/2011	8:02:11 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:02:11 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:02:11 AM	Tube furnace set to 0
1/4/2011	8:03:09 AM	Helium valve closed
1/4/2011	8:03:09 AM	H2 valve closed
1/4/2011	8:03:09 AM	BCl3 valve closed
1/4/2011	8:03:09 AM	PH3 valve closed
1/4/2011	8:03:09 AM	SiCl4 pre valve closed
1/4/2011	8:03:09 AM	SiCl4 post valve closed
1/4/2011	8:03:09 AM	Bubbler valve closed
1/4/2011	8:03:09 AM	Main Vac valve opened
1/4/2011	8:03:09 AM	Bypass valve opened
1/4/2011	8:03:09 AM	Helium MFC set to  0.000000
1/4/2011	8:03:09 AM	H2 MFC set to  0.000000
1/4/2011	8:03:09 AM	BCl3 MFC set to  0.000000
1/4/2011	8:03:09 AM	PHl3 MFC set to  0.000000
1/4/2011	8:03:09 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:03:09 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:03:09 AM	Tube furnace set to 0
1/4/2011	8:03:09 AM	Run finished at 8:03 AM
1/4/2011	8:03:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2011	8:04:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/4/2011	8:04:19 AM	Recipe started at 8:04 AM
1/4/2011	8:04:19 AM	Helium valve closed
1/4/2011	8:04:19 AM	H2 valve closed
1/4/2011	8:04:19 AM	BCl3 valve closed
1/4/2011	8:04:19 AM	PH3 valve closed
1/4/2011	8:04:19 AM	SiCl4 pre valve closed
1/4/2011	8:04:19 AM	SiCl4 post valve closed
1/4/2011	8:04:19 AM	Main Vac valve closed
1/4/2011	8:04:19 AM	Bypass valve closed
1/4/2011	8:04:19 AM	Bubbler valve closed
1/4/2011	8:04:19 AM	Helium MFC set to  0.000000
1/4/2011	8:04:19 AM	H2 MFC set to  0.000000
1/4/2011	8:04:19 AM	BCl3 MFC set to  0.000000
1/4/2011	8:04:19 AM	PHl3 MFC set to  0.000000
1/4/2011	8:04:19 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:04:19 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:04:19 AM	Tube furnace set to 0
1/4/2011	8:04:19 AM	Run finished at 8:04 AM
1/4/2011	8:04:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/4/2011	8:04:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/4/2011	8:04:49 AM	Recipe started at 8:04 AM
1/4/2011	8:04:49 AM	Helium valve closed
1/4/2011	8:04:49 AM	H2 valve closed
1/4/2011	8:04:49 AM	BCl3 valve closed
1/4/2011	8:04:49 AM	PH3 valve closed
1/4/2011	8:04:49 AM	SiCl4 pre valve closed
1/4/2011	8:04:49 AM	SiCl4 post valve closed
1/4/2011	8:04:49 AM	Main Vac valve closed
1/4/2011	8:04:49 AM	Bubbler valve closed
1/4/2011	8:04:49 AM	Bypass valve opened
1/4/2011	8:04:49 AM	Helium MFC set to  0.000000
1/4/2011	8:04:49 AM	H2 MFC set to  0.000000
1/4/2011	8:04:49 AM	BCl3 MFC set to  0.000000
1/4/2011	8:04:49 AM	PHl3 MFC set to  0.000000
1/4/2011	8:04:49 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:04:49 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:04:49 AM	Tube furnace set to 0
1/4/2011	8:04:49 AM	Helium valve closed
1/4/2011	8:04:49 AM	H2 valve closed
1/4/2011	8:04:49 AM	BCl3 valve closed
1/4/2011	8:04:49 AM	PH3 valve closed
1/4/2011	8:04:49 AM	SiCl4 pre valve closed
1/4/2011	8:04:49 AM	SiCl4 post valve closed
1/4/2011	8:04:49 AM	Bubbler valve closed
1/4/2011	8:04:49 AM	Main Vac valve opened
1/4/2011	8:04:49 AM	Bypass valve opened
1/4/2011	8:04:49 AM	Helium MFC set to  0.000000
1/4/2011	8:04:49 AM	H2 MFC set to  0.000000
1/4/2011	8:04:49 AM	BCl3 MFC set to  0.000000
1/4/2011	8:04:49 AM	PHl3 MFC set to  0.000000
1/4/2011	8:04:49 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:04:49 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:04:49 AM	Tube furnace set to 0
1/4/2011	8:05:49 AM	H2 valve closed
1/4/2011	8:05:49 AM	BCl3 valve closed
1/4/2011	8:05:49 AM	PH3 valve closed
1/4/2011	8:05:49 AM	SiCl4 pre valve closed
1/4/2011	8:05:49 AM	SiCl4 post valve closed
1/4/2011	8:05:49 AM	Bubbler valve closed
1/4/2011	8:05:49 AM	Helium valve opened
1/4/2011	8:05:49 AM	Main Vac valve opened
1/4/2011	8:05:49 AM	Bypass valve opened
1/4/2011	8:05:49 AM	Helium MFC set to  100.000000
1/4/2011	8:05:49 AM	H2 MFC set to  0.000000
1/4/2011	8:05:49 AM	BCl3 MFC set to  0.000000
1/4/2011	8:05:49 AM	PHl3 MFC set to  0.000000
1/4/2011	8:05:49 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:05:49 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:05:50 AM	Tube furnace set to 0
1/4/2011	8:06:50 AM	Helium valve closed
1/4/2011	8:06:50 AM	H2 valve closed
1/4/2011	8:06:50 AM	BCl3 valve closed
1/4/2011	8:06:50 AM	PH3 valve closed
1/4/2011	8:06:50 AM	SiCl4 pre valve closed
1/4/2011	8:06:50 AM	SiCl4 post valve closed
1/4/2011	8:06:50 AM	Bubbler valve closed
1/4/2011	8:06:50 AM	Main Vac valve opened
1/4/2011	8:06:50 AM	Bypass valve opened
1/4/2011	8:06:50 AM	Helium MFC set to  0.000000
1/4/2011	8:06:50 AM	H2 MFC set to  0.000000
1/4/2011	8:06:50 AM	BCl3 MFC set to  0.000000
1/4/2011	8:06:50 AM	PHl3 MFC set to  0.000000
1/4/2011	8:06:50 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:06:50 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:06:50 AM	Tube furnace set to 0
1/4/2011	8:07:50 AM	H2 valve closed
1/4/2011	8:07:50 AM	BCl3 valve closed
1/4/2011	8:07:50 AM	PH3 valve closed
1/4/2011	8:07:50 AM	SiCl4 pre valve closed
1/4/2011	8:07:50 AM	SiCl4 post valve closed
1/4/2011	8:07:50 AM	Bubbler valve closed
1/4/2011	8:07:50 AM	Helium valve opened
1/4/2011	8:07:50 AM	Main Vac valve opened
1/4/2011	8:07:50 AM	Bypass valve opened
1/4/2011	8:07:50 AM	Helium MFC set to  100.000000
1/4/2011	8:07:50 AM	H2 MFC set to  0.000000
1/4/2011	8:07:50 AM	BCl3 MFC set to  0.000000
1/4/2011	8:07:50 AM	PHl3 MFC set to  0.000000
1/4/2011	8:07:50 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:07:50 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:07:50 AM	Tube furnace set to 0
1/4/2011	8:08:50 AM	Helium valve closed
1/4/2011	8:08:50 AM	H2 valve closed
1/4/2011	8:08:50 AM	BCl3 valve closed
1/4/2011	8:08:50 AM	PH3 valve closed
1/4/2011	8:08:50 AM	SiCl4 pre valve closed
1/4/2011	8:08:50 AM	SiCl4 post valve closed
1/4/2011	8:08:50 AM	Bubbler valve closed
1/4/2011	8:08:50 AM	Main Vac valve opened
1/4/2011	8:08:50 AM	Bypass valve opened
1/4/2011	8:08:50 AM	Helium MFC set to  0.000000
1/4/2011	8:08:50 AM	H2 MFC set to  0.000000
1/4/2011	8:08:50 AM	BCl3 MFC set to  0.000000
1/4/2011	8:08:50 AM	PHl3 MFC set to  0.000000
1/4/2011	8:08:50 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:08:50 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:08:50 AM	Tube furnace set to 0
1/4/2011	8:09:50 AM	H2 valve closed
1/4/2011	8:09:50 AM	BCl3 valve closed
1/4/2011	8:09:50 AM	PH3 valve closed
1/4/2011	8:09:50 AM	SiCl4 pre valve closed
1/4/2011	8:09:50 AM	SiCl4 post valve closed
1/4/2011	8:09:50 AM	Bubbler valve closed
1/4/2011	8:09:50 AM	Helium valve opened
1/4/2011	8:09:50 AM	Main Vac valve opened
1/4/2011	8:09:50 AM	Bypass valve opened
1/4/2011	8:09:50 AM	Helium MFC set to  100.000000
1/4/2011	8:09:50 AM	H2 MFC set to  0.000000
1/4/2011	8:09:50 AM	BCl3 MFC set to  0.000000
1/4/2011	8:09:50 AM	PHl3 MFC set to  0.000000
1/4/2011	8:09:50 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:09:50 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:09:50 AM	Tube furnace set to 0
1/4/2011	8:10:50 AM	Helium valve closed
1/4/2011	8:10:50 AM	H2 valve closed
1/4/2011	8:10:50 AM	BCl3 valve closed
1/4/2011	8:10:50 AM	PH3 valve closed
1/4/2011	8:10:50 AM	SiCl4 pre valve closed
1/4/2011	8:10:50 AM	SiCl4 post valve closed
1/4/2011	8:10:50 AM	Bubbler valve closed
1/4/2011	8:10:50 AM	Main Vac valve opened
1/4/2011	8:10:50 AM	Bypass valve opened
1/4/2011	8:10:50 AM	Helium MFC set to  0.000000
1/4/2011	8:10:50 AM	H2 MFC set to  0.000000
1/4/2011	8:10:50 AM	BCl3 MFC set to  0.000000
1/4/2011	8:10:50 AM	PHl3 MFC set to  0.000000
1/4/2011	8:10:50 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:10:50 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:10:51 AM	Tube furnace set to 0
1/4/2011	8:11:51 AM	H2 valve closed
1/4/2011	8:11:51 AM	BCl3 valve closed
1/4/2011	8:11:51 AM	PH3 valve closed
1/4/2011	8:11:51 AM	SiCl4 pre valve closed
1/4/2011	8:11:51 AM	SiCl4 post valve closed
1/4/2011	8:11:51 AM	Bubbler valve closed
1/4/2011	8:11:51 AM	Helium valve opened
1/4/2011	8:11:51 AM	Main Vac valve opened
1/4/2011	8:11:51 AM	Bypass valve opened
1/4/2011	8:11:51 AM	Helium MFC set to  100.000000
1/4/2011	8:11:51 AM	H2 MFC set to  0.000000
1/4/2011	8:11:51 AM	BCl3 MFC set to  0.000000
1/4/2011	8:11:51 AM	PHl3 MFC set to  0.000000
1/4/2011	8:11:51 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:11:51 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:11:51 AM	Tube furnace set to 0
1/4/2011	8:12:51 AM	Helium valve closed
1/4/2011	8:12:51 AM	H2 valve closed
1/4/2011	8:12:51 AM	BCl3 valve closed
1/4/2011	8:12:51 AM	PH3 valve closed
1/4/2011	8:12:51 AM	SiCl4 pre valve closed
1/4/2011	8:12:51 AM	SiCl4 post valve closed
1/4/2011	8:12:51 AM	Bubbler valve closed
1/4/2011	8:12:51 AM	Main Vac valve opened
1/4/2011	8:12:51 AM	Bypass valve opened
1/4/2011	8:12:51 AM	Helium MFC set to  0.000000
1/4/2011	8:12:51 AM	H2 MFC set to  0.000000
1/4/2011	8:12:51 AM	BCl3 MFC set to  0.000000
1/4/2011	8:12:51 AM	PHl3 MFC set to  0.000000
1/4/2011	8:12:51 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:12:51 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:12:51 AM	Tube furnace set to 0
1/4/2011	8:13:51 AM	H2 valve closed
1/4/2011	8:13:51 AM	BCl3 valve closed
1/4/2011	8:13:51 AM	PH3 valve closed
1/4/2011	8:13:51 AM	SiCl4 pre valve closed
1/4/2011	8:13:51 AM	SiCl4 post valve closed
1/4/2011	8:13:51 AM	Bubbler valve closed
1/4/2011	8:13:51 AM	Helium valve opened
1/4/2011	8:13:51 AM	Main Vac valve opened
1/4/2011	8:13:51 AM	Bypass valve opened
1/4/2011	8:13:51 AM	Helium MFC set to  100.000000
1/4/2011	8:13:51 AM	H2 MFC set to  0.000000
1/4/2011	8:13:51 AM	BCl3 MFC set to  0.000000
1/4/2011	8:13:51 AM	PHl3 MFC set to  0.000000
1/4/2011	8:13:51 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:13:51 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:13:51 AM	Tube furnace set to 0
1/4/2011	8:14:51 AM	Helium valve closed
1/4/2011	8:14:51 AM	H2 valve closed
1/4/2011	8:14:51 AM	BCl3 valve closed
1/4/2011	8:14:51 AM	PH3 valve closed
1/4/2011	8:14:51 AM	SiCl4 pre valve closed
1/4/2011	8:14:51 AM	SiCl4 post valve closed
1/4/2011	8:14:51 AM	Bubbler valve closed
1/4/2011	8:14:51 AM	Main Vac valve opened
1/4/2011	8:14:51 AM	Bypass valve opened
1/4/2011	8:14:51 AM	Helium MFC set to  0.000000
1/4/2011	8:14:51 AM	H2 MFC set to  0.000000
1/4/2011	8:14:51 AM	BCl3 MFC set to  0.000000
1/4/2011	8:14:51 AM	PHl3 MFC set to  0.000000
1/4/2011	8:14:51 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:14:51 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:14:51 AM	Tube furnace set to 0
1/4/2011	8:15:51 AM	H2 valve closed
1/4/2011	8:15:51 AM	BCl3 valve closed
1/4/2011	8:15:51 AM	PH3 valve closed
1/4/2011	8:15:51 AM	SiCl4 pre valve closed
1/4/2011	8:15:51 AM	SiCl4 post valve closed
1/4/2011	8:15:51 AM	Bubbler valve closed
1/4/2011	8:15:51 AM	Helium valve opened
1/4/2011	8:15:51 AM	Main Vac valve opened
1/4/2011	8:15:51 AM	Bypass valve opened
1/4/2011	8:15:51 AM	Helium MFC set to  100.000000
1/4/2011	8:15:51 AM	H2 MFC set to  0.000000
1/4/2011	8:15:51 AM	BCl3 MFC set to  0.000000
1/4/2011	8:15:51 AM	PHl3 MFC set to  0.000000
1/4/2011	8:15:51 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:15:51 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:15:52 AM	Tube furnace set to 0
1/4/2011	8:16:52 AM	Helium valve closed
1/4/2011	8:16:52 AM	H2 valve closed
1/4/2011	8:16:52 AM	BCl3 valve closed
1/4/2011	8:16:52 AM	PH3 valve closed
1/4/2011	8:16:52 AM	SiCl4 pre valve closed
1/4/2011	8:16:52 AM	SiCl4 post valve closed
1/4/2011	8:16:52 AM	Bubbler valve closed
1/4/2011	8:16:52 AM	Main Vac valve opened
1/4/2011	8:16:52 AM	Bypass valve opened
1/4/2011	8:16:52 AM	Helium MFC set to  0.000000
1/4/2011	8:16:52 AM	H2 MFC set to  0.000000
1/4/2011	8:16:52 AM	BCl3 MFC set to  0.000000
1/4/2011	8:16:52 AM	PHl3 MFC set to  0.000000
1/4/2011	8:16:52 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:16:52 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:16:52 AM	Tube furnace set to 0
1/4/2011	8:17:52 AM	H2 valve closed
1/4/2011	8:17:52 AM	BCl3 valve closed
1/4/2011	8:17:52 AM	PH3 valve closed
1/4/2011	8:17:52 AM	SiCl4 pre valve closed
1/4/2011	8:17:52 AM	SiCl4 post valve closed
1/4/2011	8:17:52 AM	Bubbler valve closed
1/4/2011	8:17:52 AM	Helium valve opened
1/4/2011	8:17:52 AM	Main Vac valve opened
1/4/2011	8:17:52 AM	Bypass valve opened
1/4/2011	8:17:52 AM	Helium MFC set to  100.000000
1/4/2011	8:17:52 AM	H2 MFC set to  0.000000
1/4/2011	8:17:52 AM	BCl3 MFC set to  0.000000
1/4/2011	8:17:52 AM	PHl3 MFC set to  0.000000
1/4/2011	8:17:52 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:17:52 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:17:52 AM	Tube furnace set to 0
1/4/2011	8:18:52 AM	Helium valve closed
1/4/2011	8:18:52 AM	H2 valve closed
1/4/2011	8:18:52 AM	BCl3 valve closed
1/4/2011	8:18:52 AM	PH3 valve closed
1/4/2011	8:18:52 AM	SiCl4 pre valve closed
1/4/2011	8:18:52 AM	SiCl4 post valve closed
1/4/2011	8:18:52 AM	Bubbler valve closed
1/4/2011	8:18:52 AM	Main Vac valve opened
1/4/2011	8:18:52 AM	Bypass valve opened
1/4/2011	8:18:52 AM	Helium MFC set to  0.000000
1/4/2011	8:18:52 AM	H2 MFC set to  0.000000
1/4/2011	8:18:52 AM	BCl3 MFC set to  0.000000
1/4/2011	8:18:52 AM	PHl3 MFC set to  0.000000
1/4/2011	8:18:52 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:18:52 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:18:52 AM	Tube furnace set to 0
1/4/2011	8:19:52 AM	H2 valve closed
1/4/2011	8:19:52 AM	BCl3 valve closed
1/4/2011	8:19:52 AM	PH3 valve closed
1/4/2011	8:19:52 AM	SiCl4 pre valve closed
1/4/2011	8:19:52 AM	SiCl4 post valve closed
1/4/2011	8:19:52 AM	Bubbler valve closed
1/4/2011	8:19:52 AM	Helium valve opened
1/4/2011	8:19:52 AM	Main Vac valve opened
1/4/2011	8:19:52 AM	Bypass valve opened
1/4/2011	8:19:52 AM	Helium MFC set to  100.000000
1/4/2011	8:19:52 AM	H2 MFC set to  0.000000
1/4/2011	8:19:52 AM	BCl3 MFC set to  0.000000
1/4/2011	8:19:52 AM	PHl3 MFC set to  0.000000
1/4/2011	8:19:52 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:19:52 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:19:52 AM	Tube furnace set to 0
1/4/2011	8:20:52 AM	Helium valve closed
1/4/2011	8:20:52 AM	H2 valve closed
1/4/2011	8:20:52 AM	BCl3 valve closed
1/4/2011	8:20:52 AM	PH3 valve closed
1/4/2011	8:20:52 AM	SiCl4 pre valve closed
1/4/2011	8:20:52 AM	SiCl4 post valve closed
1/4/2011	8:20:52 AM	Bubbler valve closed
1/4/2011	8:20:52 AM	Main Vac valve opened
1/4/2011	8:20:52 AM	Bypass valve opened
1/4/2011	8:20:52 AM	Helium MFC set to  0.000000
1/4/2011	8:20:52 AM	H2 MFC set to  0.000000
1/4/2011	8:20:52 AM	BCl3 MFC set to  0.000000
1/4/2011	8:20:52 AM	PHl3 MFC set to  0.000000
1/4/2011	8:20:52 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:20:52 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:20:53 AM	Tube furnace set to 0
1/4/2011	8:21:53 AM	H2 valve closed
1/4/2011	8:21:53 AM	BCl3 valve closed
1/4/2011	8:21:53 AM	PH3 valve closed
1/4/2011	8:21:53 AM	SiCl4 pre valve closed
1/4/2011	8:21:53 AM	SiCl4 post valve closed
1/4/2011	8:21:53 AM	Bubbler valve closed
1/4/2011	8:21:53 AM	Helium valve opened
1/4/2011	8:21:53 AM	Main Vac valve opened
1/4/2011	8:21:53 AM	Bypass valve opened
1/4/2011	8:21:53 AM	Helium MFC set to  100.000000
1/4/2011	8:21:53 AM	H2 MFC set to  0.000000
1/4/2011	8:21:53 AM	BCl3 MFC set to  0.000000
1/4/2011	8:21:53 AM	PHl3 MFC set to  0.000000
1/4/2011	8:21:53 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:21:53 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:21:53 AM	Tube furnace set to 0
1/4/2011	8:22:53 AM	Helium valve closed
1/4/2011	8:22:53 AM	H2 valve closed
1/4/2011	8:22:53 AM	BCl3 valve closed
1/4/2011	8:22:53 AM	PH3 valve closed
1/4/2011	8:22:53 AM	SiCl4 pre valve closed
1/4/2011	8:22:53 AM	SiCl4 post valve closed
1/4/2011	8:22:53 AM	Bubbler valve closed
1/4/2011	8:22:53 AM	Main Vac valve opened
1/4/2011	8:22:53 AM	Bypass valve opened
1/4/2011	8:22:53 AM	Helium MFC set to  0.000000
1/4/2011	8:22:53 AM	H2 MFC set to  0.000000
1/4/2011	8:22:53 AM	BCl3 MFC set to  0.000000
1/4/2011	8:22:53 AM	PHl3 MFC set to  0.000000
1/4/2011	8:22:53 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:22:53 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:22:53 AM	Tube furnace set to 0
1/4/2011	8:23:53 AM	H2 valve closed
1/4/2011	8:23:53 AM	BCl3 valve closed
1/4/2011	8:23:53 AM	PH3 valve closed
1/4/2011	8:23:53 AM	SiCl4 pre valve closed
1/4/2011	8:23:53 AM	SiCl4 post valve closed
1/4/2011	8:23:53 AM	Bubbler valve closed
1/4/2011	8:23:53 AM	Helium valve opened
1/4/2011	8:23:53 AM	Main Vac valve opened
1/4/2011	8:23:53 AM	Bypass valve opened
1/4/2011	8:23:53 AM	Helium MFC set to  100.000000
1/4/2011	8:23:53 AM	H2 MFC set to  0.000000
1/4/2011	8:23:53 AM	BCl3 MFC set to  0.000000
1/4/2011	8:23:53 AM	PHl3 MFC set to  0.000000
1/4/2011	8:23:53 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:23:53 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:23:53 AM	Tube furnace set to 0
1/4/2011	8:24:53 AM	Helium valve closed
1/4/2011	8:24:53 AM	H2 valve closed
1/4/2011	8:24:53 AM	BCl3 valve closed
1/4/2011	8:24:53 AM	PH3 valve closed
1/4/2011	8:24:53 AM	SiCl4 pre valve closed
1/4/2011	8:24:53 AM	SiCl4 post valve closed
1/4/2011	8:24:53 AM	Bubbler valve closed
1/4/2011	8:24:53 AM	Main Vac valve opened
1/4/2011	8:24:53 AM	Bypass valve opened
1/4/2011	8:24:53 AM	Helium MFC set to  0.000000
1/4/2011	8:24:53 AM	H2 MFC set to  0.000000
1/4/2011	8:24:53 AM	BCl3 MFC set to  0.000000
1/4/2011	8:24:53 AM	PHl3 MFC set to  0.000000
1/4/2011	8:24:53 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:24:53 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:24:53 AM	Tube furnace set to 0
1/4/2011	8:24:54 AM	Run finished at 8:24 AM
1/4/2011	8:24:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/4/2011	8:41:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/4/2011	8:41:04 AM	Recipe started at 8:41 AM
1/4/2011	8:41:04 AM	Helium valve closed
1/4/2011	8:41:04 AM	H2 valve closed
1/4/2011	8:41:04 AM	BCl3 valve closed
1/4/2011	8:41:04 AM	PH3 valve closed
1/4/2011	8:41:04 AM	SiCl4 pre valve closed
1/4/2011	8:41:04 AM	SiCl4 post valve closed
1/4/2011	8:41:04 AM	Main Vac valve closed
1/4/2011	8:41:04 AM	Bypass valve closed
1/4/2011	8:41:04 AM	Bubbler valve closed
1/4/2011	8:41:04 AM	Helium MFC set to  0.000000
1/4/2011	8:41:04 AM	H2 MFC set to  0.000000
1/4/2011	8:41:04 AM	BCl3 MFC set to  0.000000
1/4/2011	8:41:04 AM	PHl3 MFC set to  0.000000
1/4/2011	8:41:04 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:41:04 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:41:05 AM	Tube furnace set to 0
1/4/2011	8:41:05 AM	Run finished at 8:41 AM
1/4/2011	8:41:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/4/2011	8:41:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2011	8:41:25 AM	Recipe started at 8:41 AM
1/4/2011	8:41:25 AM	Helium valve closed
1/4/2011	8:41:25 AM	H2 valve closed
1/4/2011	8:41:25 AM	BCl3 valve closed
1/4/2011	8:41:25 AM	PH3 valve closed
1/4/2011	8:41:25 AM	SiCl4 pre valve closed
1/4/2011	8:41:25 AM	SiCl4 post valve closed
1/4/2011	8:41:25 AM	Main Vac valve closed
1/4/2011	8:41:25 AM	Bubbler valve closed
1/4/2011	8:41:25 AM	Bypass valve opened
1/4/2011	8:41:25 AM	Helium MFC set to  0.000000
1/4/2011	8:41:25 AM	H2 MFC set to  0.000000
1/4/2011	8:41:25 AM	BCl3 MFC set to  0.000000
1/4/2011	8:41:25 AM	PHl3 MFC set to  0.000000
1/4/2011	8:41:25 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:41:25 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:41:25 AM	Tube furnace set to 0
1/4/2011	8:41:25 AM	Helium valve closed
1/4/2011	8:41:25 AM	H2 valve closed
1/4/2011	8:41:25 AM	BCl3 valve closed
1/4/2011	8:41:25 AM	PH3 valve closed
1/4/2011	8:41:25 AM	SiCl4 pre valve closed
1/4/2011	8:41:25 AM	SiCl4 post valve closed
1/4/2011	8:41:25 AM	Bubbler valve closed
1/4/2011	8:41:25 AM	Main Vac valve opened
1/4/2011	8:41:25 AM	Bypass valve opened
1/4/2011	8:41:25 AM	Helium MFC set to  0.000000
1/4/2011	8:41:25 AM	H2 MFC set to  0.000000
1/4/2011	8:41:25 AM	BCl3 MFC set to  0.000000
1/4/2011	8:41:25 AM	PHl3 MFC set to  0.000000
1/4/2011	8:41:25 AM	SiCl4 MFC set to  0.000000
1/4/2011	8:41:25 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	8:41:25 AM	Tube furnace set to 0
1/4/2011	8:41:26 AM	Run finished at 8:41 AM
1/4/2011	8:41:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2011	9:17:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/4/2011	9:17:04 AM	Recipe started at 9:17 AM
1/4/2011	9:17:04 AM	Helium valve closed
1/4/2011	9:17:04 AM	H2 valve closed
1/4/2011	9:17:04 AM	BCl3 valve closed
1/4/2011	9:17:04 AM	PH3 valve closed
1/4/2011	9:17:04 AM	SiCl4 pre valve closed
1/4/2011	9:17:04 AM	SiCl4 post valve closed
1/4/2011	9:17:04 AM	Main Vac valve closed
1/4/2011	9:17:04 AM	Bypass valve closed
1/4/2011	9:17:04 AM	Bubbler valve closed
1/4/2011	9:17:04 AM	Helium MFC set to  0.000000
1/4/2011	9:17:04 AM	H2 MFC set to  0.000000
1/4/2011	9:17:04 AM	BCl3 MFC set to  0.000000
1/4/2011	9:17:04 AM	PHl3 MFC set to  0.000000
1/4/2011	9:17:04 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:17:04 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:17:04 AM	Tube furnace set to 0
1/4/2011	9:17:05 AM	Run finished at 9:17 AM
1/4/2011	9:17:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/4/2011	9:17:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/4/2011	9:17:33 AM	Recipe started at 9:17 AM
1/4/2011	9:17:33 AM	Helium valve closed
1/4/2011	9:17:33 AM	H2 valve closed
1/4/2011	9:17:33 AM	BCl3 valve closed
1/4/2011	9:17:33 AM	PH3 valve closed
1/4/2011	9:17:33 AM	SiCl4 pre valve closed
1/4/2011	9:17:33 AM	SiCl4 post valve closed
1/4/2011	9:17:33 AM	Main Vac valve closed
1/4/2011	9:17:33 AM	Bubbler valve closed
1/4/2011	9:17:33 AM	Bypass valve opened
1/4/2011	9:17:33 AM	Helium MFC set to  0.000000
1/4/2011	9:17:33 AM	H2 MFC set to  0.000000
1/4/2011	9:17:33 AM	BCl3 MFC set to  0.000000
1/4/2011	9:17:33 AM	PHl3 MFC set to  0.000000
1/4/2011	9:17:33 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:17:33 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:17:33 AM	Tube furnace set to 0
1/4/2011	9:17:34 AM	Helium valve closed
1/4/2011	9:17:34 AM	H2 valve closed
1/4/2011	9:17:34 AM	BCl3 valve closed
1/4/2011	9:17:34 AM	PH3 valve closed
1/4/2011	9:17:34 AM	SiCl4 pre valve closed
1/4/2011	9:17:34 AM	SiCl4 post valve closed
1/4/2011	9:17:34 AM	Bubbler valve closed
1/4/2011	9:17:34 AM	Main Vac valve opened
1/4/2011	9:17:34 AM	Bypass valve opened
1/4/2011	9:17:34 AM	Helium MFC set to  0.000000
1/4/2011	9:17:34 AM	H2 MFC set to  0.000000
1/4/2011	9:17:34 AM	BCl3 MFC set to  0.000000
1/4/2011	9:17:34 AM	PHl3 MFC set to  0.000000
1/4/2011	9:17:34 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:17:34 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:17:34 AM	Tube furnace set to 0
1/4/2011	9:18:34 AM	H2 valve closed
1/4/2011	9:18:34 AM	BCl3 valve closed
1/4/2011	9:18:34 AM	PH3 valve closed
1/4/2011	9:18:34 AM	SiCl4 pre valve closed
1/4/2011	9:18:34 AM	SiCl4 post valve closed
1/4/2011	9:18:34 AM	Bubbler valve closed
1/4/2011	9:18:34 AM	Helium valve opened
1/4/2011	9:18:34 AM	Main Vac valve opened
1/4/2011	9:18:34 AM	Bypass valve opened
1/4/2011	9:18:34 AM	Helium MFC set to  100.000000
1/4/2011	9:18:34 AM	H2 MFC set to  0.000000
1/4/2011	9:18:34 AM	BCl3 MFC set to  0.000000
1/4/2011	9:18:34 AM	PHl3 MFC set to  0.000000
1/4/2011	9:18:34 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:18:34 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:18:34 AM	Tube furnace set to 0
1/4/2011	9:19:34 AM	Helium valve closed
1/4/2011	9:19:34 AM	H2 valve closed
1/4/2011	9:19:34 AM	BCl3 valve closed
1/4/2011	9:19:34 AM	PH3 valve closed
1/4/2011	9:19:34 AM	SiCl4 pre valve closed
1/4/2011	9:19:34 AM	SiCl4 post valve closed
1/4/2011	9:19:34 AM	Bubbler valve closed
1/4/2011	9:19:34 AM	Main Vac valve opened
1/4/2011	9:19:34 AM	Bypass valve opened
1/4/2011	9:19:34 AM	Helium MFC set to  0.000000
1/4/2011	9:19:34 AM	H2 MFC set to  0.000000
1/4/2011	9:19:34 AM	BCl3 MFC set to  0.000000
1/4/2011	9:19:34 AM	PHl3 MFC set to  0.000000
1/4/2011	9:19:34 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:19:34 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:19:34 AM	Tube furnace set to 0
1/4/2011	9:20:34 AM	H2 valve closed
1/4/2011	9:20:34 AM	BCl3 valve closed
1/4/2011	9:20:34 AM	PH3 valve closed
1/4/2011	9:20:34 AM	SiCl4 pre valve closed
1/4/2011	9:20:34 AM	SiCl4 post valve closed
1/4/2011	9:20:34 AM	Bubbler valve closed
1/4/2011	9:20:34 AM	Helium valve opened
1/4/2011	9:20:34 AM	Main Vac valve opened
1/4/2011	9:20:34 AM	Bypass valve opened
1/4/2011	9:20:34 AM	Helium MFC set to  100.000000
1/4/2011	9:20:34 AM	H2 MFC set to  0.000000
1/4/2011	9:20:34 AM	BCl3 MFC set to  0.000000
1/4/2011	9:20:34 AM	PHl3 MFC set to  0.000000
1/4/2011	9:20:34 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:20:34 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:20:34 AM	Tube furnace set to 0
1/4/2011	9:21:34 AM	Helium valve closed
1/4/2011	9:21:34 AM	H2 valve closed
1/4/2011	9:21:34 AM	BCl3 valve closed
1/4/2011	9:21:34 AM	PH3 valve closed
1/4/2011	9:21:34 AM	SiCl4 pre valve closed
1/4/2011	9:21:34 AM	SiCl4 post valve closed
1/4/2011	9:21:34 AM	Bubbler valve closed
1/4/2011	9:21:34 AM	Main Vac valve opened
1/4/2011	9:21:34 AM	Bypass valve opened
1/4/2011	9:21:34 AM	Helium MFC set to  0.000000
1/4/2011	9:21:34 AM	H2 MFC set to  0.000000
1/4/2011	9:21:34 AM	BCl3 MFC set to  0.000000
1/4/2011	9:21:34 AM	PHl3 MFC set to  0.000000
1/4/2011	9:21:34 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:21:34 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:21:35 AM	Tube furnace set to 0
1/4/2011	9:22:35 AM	H2 valve closed
1/4/2011	9:22:35 AM	BCl3 valve closed
1/4/2011	9:22:35 AM	PH3 valve closed
1/4/2011	9:22:35 AM	SiCl4 pre valve closed
1/4/2011	9:22:35 AM	SiCl4 post valve closed
1/4/2011	9:22:35 AM	Bubbler valve closed
1/4/2011	9:22:35 AM	Helium valve opened
1/4/2011	9:22:35 AM	Main Vac valve opened
1/4/2011	9:22:35 AM	Bypass valve opened
1/4/2011	9:22:35 AM	Helium MFC set to  100.000000
1/4/2011	9:22:35 AM	H2 MFC set to  0.000000
1/4/2011	9:22:35 AM	BCl3 MFC set to  0.000000
1/4/2011	9:22:35 AM	PHl3 MFC set to  0.000000
1/4/2011	9:22:35 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:22:35 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:22:35 AM	Tube furnace set to 0
1/4/2011	9:23:35 AM	Helium valve closed
1/4/2011	9:23:35 AM	H2 valve closed
1/4/2011	9:23:35 AM	BCl3 valve closed
1/4/2011	9:23:35 AM	PH3 valve closed
1/4/2011	9:23:35 AM	SiCl4 pre valve closed
1/4/2011	9:23:35 AM	SiCl4 post valve closed
1/4/2011	9:23:35 AM	Bubbler valve closed
1/4/2011	9:23:35 AM	Main Vac valve opened
1/4/2011	9:23:35 AM	Bypass valve opened
1/4/2011	9:23:35 AM	Helium MFC set to  0.000000
1/4/2011	9:23:35 AM	H2 MFC set to  0.000000
1/4/2011	9:23:35 AM	BCl3 MFC set to  0.000000
1/4/2011	9:23:35 AM	PHl3 MFC set to  0.000000
1/4/2011	9:23:35 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:23:35 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:23:35 AM	Tube furnace set to 0
1/4/2011	9:24:35 AM	H2 valve closed
1/4/2011	9:24:35 AM	BCl3 valve closed
1/4/2011	9:24:35 AM	PH3 valve closed
1/4/2011	9:24:35 AM	SiCl4 pre valve closed
1/4/2011	9:24:35 AM	SiCl4 post valve closed
1/4/2011	9:24:35 AM	Bubbler valve closed
1/4/2011	9:24:35 AM	Helium valve opened
1/4/2011	9:24:35 AM	Main Vac valve opened
1/4/2011	9:24:35 AM	Bypass valve opened
1/4/2011	9:24:35 AM	Helium MFC set to  100.000000
1/4/2011	9:24:35 AM	H2 MFC set to  0.000000
1/4/2011	9:24:35 AM	BCl3 MFC set to  0.000000
1/4/2011	9:24:35 AM	PHl3 MFC set to  0.000000
1/4/2011	9:24:35 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:24:35 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:24:35 AM	Tube furnace set to 0
1/4/2011	9:25:35 AM	Helium valve closed
1/4/2011	9:25:35 AM	H2 valve closed
1/4/2011	9:25:35 AM	BCl3 valve closed
1/4/2011	9:25:35 AM	PH3 valve closed
1/4/2011	9:25:35 AM	SiCl4 pre valve closed
1/4/2011	9:25:35 AM	SiCl4 post valve closed
1/4/2011	9:25:35 AM	Bubbler valve closed
1/4/2011	9:25:35 AM	Main Vac valve opened
1/4/2011	9:25:35 AM	Bypass valve opened
1/4/2011	9:25:35 AM	Helium MFC set to  0.000000
1/4/2011	9:25:35 AM	H2 MFC set to  0.000000
1/4/2011	9:25:35 AM	BCl3 MFC set to  0.000000
1/4/2011	9:25:35 AM	PHl3 MFC set to  0.000000
1/4/2011	9:25:35 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:25:35 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:25:35 AM	Tube furnace set to 0
1/4/2011	9:26:35 AM	H2 valve closed
1/4/2011	9:26:35 AM	BCl3 valve closed
1/4/2011	9:26:35 AM	PH3 valve closed
1/4/2011	9:26:35 AM	SiCl4 pre valve closed
1/4/2011	9:26:35 AM	SiCl4 post valve closed
1/4/2011	9:26:35 AM	Bubbler valve closed
1/4/2011	9:26:35 AM	Helium valve opened
1/4/2011	9:26:35 AM	Main Vac valve opened
1/4/2011	9:26:35 AM	Bypass valve opened
1/4/2011	9:26:35 AM	Helium MFC set to  100.000000
1/4/2011	9:26:35 AM	H2 MFC set to  0.000000
1/4/2011	9:26:35 AM	BCl3 MFC set to  0.000000
1/4/2011	9:26:35 AM	PHl3 MFC set to  0.000000
1/4/2011	9:26:35 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:26:35 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:26:36 AM	Tube furnace set to 0
1/4/2011	9:27:36 AM	Helium valve closed
1/4/2011	9:27:36 AM	H2 valve closed
1/4/2011	9:27:36 AM	BCl3 valve closed
1/4/2011	9:27:36 AM	PH3 valve closed
1/4/2011	9:27:36 AM	SiCl4 pre valve closed
1/4/2011	9:27:36 AM	SiCl4 post valve closed
1/4/2011	9:27:36 AM	Bubbler valve closed
1/4/2011	9:27:36 AM	Main Vac valve opened
1/4/2011	9:27:36 AM	Bypass valve opened
1/4/2011	9:27:36 AM	Helium MFC set to  0.000000
1/4/2011	9:27:36 AM	H2 MFC set to  0.000000
1/4/2011	9:27:36 AM	BCl3 MFC set to  0.000000
1/4/2011	9:27:36 AM	PHl3 MFC set to  0.000000
1/4/2011	9:27:36 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:27:36 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:27:36 AM	Tube furnace set to 0
1/4/2011	9:28:36 AM	H2 valve closed
1/4/2011	9:28:36 AM	BCl3 valve closed
1/4/2011	9:28:36 AM	PH3 valve closed
1/4/2011	9:28:36 AM	SiCl4 pre valve closed
1/4/2011	9:28:36 AM	SiCl4 post valve closed
1/4/2011	9:28:36 AM	Bubbler valve closed
1/4/2011	9:28:36 AM	Helium valve opened
1/4/2011	9:28:36 AM	Main Vac valve opened
1/4/2011	9:28:36 AM	Bypass valve opened
1/4/2011	9:28:36 AM	Helium MFC set to  100.000000
1/4/2011	9:28:36 AM	H2 MFC set to  0.000000
1/4/2011	9:28:36 AM	BCl3 MFC set to  0.000000
1/4/2011	9:28:36 AM	PHl3 MFC set to  0.000000
1/4/2011	9:28:36 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:28:36 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:28:36 AM	Tube furnace set to 0
1/4/2011	9:29:36 AM	Helium valve closed
1/4/2011	9:29:36 AM	H2 valve closed
1/4/2011	9:29:36 AM	BCl3 valve closed
1/4/2011	9:29:36 AM	PH3 valve closed
1/4/2011	9:29:36 AM	SiCl4 pre valve closed
1/4/2011	9:29:36 AM	SiCl4 post valve closed
1/4/2011	9:29:36 AM	Bubbler valve closed
1/4/2011	9:29:36 AM	Main Vac valve opened
1/4/2011	9:29:36 AM	Bypass valve opened
1/4/2011	9:29:36 AM	Helium MFC set to  0.000000
1/4/2011	9:29:36 AM	H2 MFC set to  0.000000
1/4/2011	9:29:36 AM	BCl3 MFC set to  0.000000
1/4/2011	9:29:36 AM	PHl3 MFC set to  0.000000
1/4/2011	9:29:36 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:29:36 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:29:36 AM	Tube furnace set to 0
1/4/2011	9:30:36 AM	H2 valve closed
1/4/2011	9:30:36 AM	BCl3 valve closed
1/4/2011	9:30:36 AM	PH3 valve closed
1/4/2011	9:30:36 AM	SiCl4 pre valve closed
1/4/2011	9:30:36 AM	SiCl4 post valve closed
1/4/2011	9:30:36 AM	Bubbler valve closed
1/4/2011	9:30:36 AM	Helium valve opened
1/4/2011	9:30:36 AM	Main Vac valve opened
1/4/2011	9:30:36 AM	Bypass valve opened
1/4/2011	9:30:36 AM	Helium MFC set to  100.000000
1/4/2011	9:30:36 AM	H2 MFC set to  0.000000
1/4/2011	9:30:36 AM	BCl3 MFC set to  0.000000
1/4/2011	9:30:36 AM	PHl3 MFC set to  0.000000
1/4/2011	9:30:36 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:30:36 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:30:36 AM	Tube furnace set to 0
1/4/2011	9:31:36 AM	Helium valve closed
1/4/2011	9:31:36 AM	H2 valve closed
1/4/2011	9:31:36 AM	BCl3 valve closed
1/4/2011	9:31:36 AM	PH3 valve closed
1/4/2011	9:31:36 AM	SiCl4 pre valve closed
1/4/2011	9:31:36 AM	SiCl4 post valve closed
1/4/2011	9:31:36 AM	Bubbler valve closed
1/4/2011	9:31:36 AM	Main Vac valve opened
1/4/2011	9:31:36 AM	Bypass valve opened
1/4/2011	9:31:36 AM	Helium MFC set to  0.000000
1/4/2011	9:31:36 AM	H2 MFC set to  0.000000
1/4/2011	9:31:36 AM	BCl3 MFC set to  0.000000
1/4/2011	9:31:36 AM	PHl3 MFC set to  0.000000
1/4/2011	9:31:36 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:31:36 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:31:37 AM	Tube furnace set to 0
1/4/2011	9:32:37 AM	H2 valve closed
1/4/2011	9:32:37 AM	BCl3 valve closed
1/4/2011	9:32:37 AM	PH3 valve closed
1/4/2011	9:32:37 AM	SiCl4 pre valve closed
1/4/2011	9:32:37 AM	SiCl4 post valve closed
1/4/2011	9:32:37 AM	Bubbler valve closed
1/4/2011	9:32:37 AM	Helium valve opened
1/4/2011	9:32:37 AM	Main Vac valve opened
1/4/2011	9:32:37 AM	Bypass valve opened
1/4/2011	9:32:37 AM	Helium MFC set to  100.000000
1/4/2011	9:32:37 AM	H2 MFC set to  0.000000
1/4/2011	9:32:37 AM	BCl3 MFC set to  0.000000
1/4/2011	9:32:37 AM	PHl3 MFC set to  0.000000
1/4/2011	9:32:37 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:32:37 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:32:37 AM	Tube furnace set to 0
1/4/2011	9:33:37 AM	Helium valve closed
1/4/2011	9:33:37 AM	H2 valve closed
1/4/2011	9:33:37 AM	BCl3 valve closed
1/4/2011	9:33:37 AM	PH3 valve closed
1/4/2011	9:33:37 AM	SiCl4 pre valve closed
1/4/2011	9:33:37 AM	SiCl4 post valve closed
1/4/2011	9:33:37 AM	Bubbler valve closed
1/4/2011	9:33:37 AM	Main Vac valve opened
1/4/2011	9:33:37 AM	Bypass valve opened
1/4/2011	9:33:37 AM	Helium MFC set to  0.000000
1/4/2011	9:33:37 AM	H2 MFC set to  0.000000
1/4/2011	9:33:37 AM	BCl3 MFC set to  0.000000
1/4/2011	9:33:37 AM	PHl3 MFC set to  0.000000
1/4/2011	9:33:37 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:33:37 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:33:37 AM	Tube furnace set to 0
1/4/2011	9:34:37 AM	H2 valve closed
1/4/2011	9:34:37 AM	BCl3 valve closed
1/4/2011	9:34:37 AM	PH3 valve closed
1/4/2011	9:34:37 AM	SiCl4 pre valve closed
1/4/2011	9:34:37 AM	SiCl4 post valve closed
1/4/2011	9:34:37 AM	Bubbler valve closed
1/4/2011	9:34:37 AM	Helium valve opened
1/4/2011	9:34:37 AM	Main Vac valve opened
1/4/2011	9:34:37 AM	Bypass valve opened
1/4/2011	9:34:37 AM	Helium MFC set to  100.000000
1/4/2011	9:34:37 AM	H2 MFC set to  0.000000
1/4/2011	9:34:37 AM	BCl3 MFC set to  0.000000
1/4/2011	9:34:37 AM	PHl3 MFC set to  0.000000
1/4/2011	9:34:37 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:34:37 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:34:37 AM	Tube furnace set to 0
1/4/2011	9:35:37 AM	Helium valve closed
1/4/2011	9:35:37 AM	H2 valve closed
1/4/2011	9:35:37 AM	BCl3 valve closed
1/4/2011	9:35:37 AM	PH3 valve closed
1/4/2011	9:35:37 AM	SiCl4 pre valve closed
1/4/2011	9:35:37 AM	SiCl4 post valve closed
1/4/2011	9:35:37 AM	Bubbler valve closed
1/4/2011	9:35:37 AM	Main Vac valve opened
1/4/2011	9:35:37 AM	Bypass valve opened
1/4/2011	9:35:37 AM	Helium MFC set to  0.000000
1/4/2011	9:35:37 AM	H2 MFC set to  0.000000
1/4/2011	9:35:37 AM	BCl3 MFC set to  0.000000
1/4/2011	9:35:37 AM	PHl3 MFC set to  0.000000
1/4/2011	9:35:37 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:35:37 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:35:37 AM	Tube furnace set to 0
1/4/2011	9:36:37 AM	H2 valve closed
1/4/2011	9:36:37 AM	BCl3 valve closed
1/4/2011	9:36:37 AM	PH3 valve closed
1/4/2011	9:36:37 AM	SiCl4 pre valve closed
1/4/2011	9:36:37 AM	SiCl4 post valve closed
1/4/2011	9:36:37 AM	Bubbler valve closed
1/4/2011	9:36:37 AM	Helium valve opened
1/4/2011	9:36:37 AM	Main Vac valve opened
1/4/2011	9:36:37 AM	Bypass valve opened
1/4/2011	9:36:37 AM	Helium MFC set to  100.000000
1/4/2011	9:36:37 AM	H2 MFC set to  0.000000
1/4/2011	9:36:37 AM	BCl3 MFC set to  0.000000
1/4/2011	9:36:37 AM	PHl3 MFC set to  0.000000
1/4/2011	9:36:37 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:36:37 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:36:38 AM	Tube furnace set to 0
1/4/2011	9:37:38 AM	Helium valve closed
1/4/2011	9:37:38 AM	H2 valve closed
1/4/2011	9:37:38 AM	BCl3 valve closed
1/4/2011	9:37:38 AM	PH3 valve closed
1/4/2011	9:37:38 AM	SiCl4 pre valve closed
1/4/2011	9:37:38 AM	SiCl4 post valve closed
1/4/2011	9:37:38 AM	Bubbler valve closed
1/4/2011	9:37:38 AM	Main Vac valve opened
1/4/2011	9:37:38 AM	Bypass valve opened
1/4/2011	9:37:38 AM	Helium MFC set to  0.000000
1/4/2011	9:37:38 AM	H2 MFC set to  0.000000
1/4/2011	9:37:38 AM	BCl3 MFC set to  0.000000
1/4/2011	9:37:38 AM	PHl3 MFC set to  0.000000
1/4/2011	9:37:38 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:37:38 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:37:38 AM	Tube furnace set to 0
1/4/2011	9:37:39 AM	Run finished at 9:37 AM
1/4/2011	9:37:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/4/2011	9:54:17 AM	Recipe started at 9:54 AM
1/4/2011	9:54:17 AM	Helium valve closed
1/4/2011	9:54:17 AM	BCl3 valve closed
1/4/2011	9:54:17 AM	PH3 valve closed
1/4/2011	9:54:17 AM	SiCl4 pre valve closed
1/4/2011	9:54:17 AM	SiCl4 post valve closed
1/4/2011	9:54:17 AM	Main Vac valve closed
1/4/2011	9:54:17 AM	Bypass valve closed
1/4/2011	9:54:17 AM	Bubbler valve closed
1/4/2011	9:54:17 AM	H2 valve opened
1/4/2011	9:54:17 AM	Helium MFC set to  0.000000
1/4/2011	9:54:17 AM	H2 MFC set to  500.000000
1/4/2011	9:54:17 AM	BCl3 MFC set to  0.000000
1/4/2011	9:54:17 AM	PHl3 MFC set to  0.000000
1/4/2011	9:54:17 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:54:17 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:54:17 AM	Tube furnace set to 0
1/4/2011	9:55:40 AM	Helium valve closed
1/4/2011	9:55:40 AM	BCl3 valve closed
1/4/2011	9:55:40 AM	PH3 valve closed
1/4/2011	9:55:40 AM	SiCl4 pre valve closed
1/4/2011	9:55:40 AM	SiCl4 post valve closed
1/4/2011	9:55:40 AM	Main Vac valve closed
1/4/2011	9:55:40 AM	Bypass valve closed
1/4/2011	9:55:40 AM	H2 valve opened
1/4/2011	9:55:40 AM	Bubbler valve opened
1/4/2011	9:55:40 AM	Helium MFC set to  0.000000
1/4/2011	9:55:40 AM	H2 MFC set to  500.000000
1/4/2011	9:55:40 AM	BCl3 MFC set to  0.000000
1/4/2011	9:55:40 AM	PHl3 MFC set to  0.000000
1/4/2011	9:55:40 AM	SiCl4 MFC set to  0.000000
1/4/2011	9:55:40 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	9:55:41 AM	Tube furnace set to 1000
1/4/2011	10:15:41 AM	Helium valve closed
1/4/2011	10:15:41 AM	PH3 valve closed
1/4/2011	10:15:41 AM	Main Vac valve closed
1/4/2011	10:15:41 AM	Bypass valve closed
1/4/2011	10:15:41 AM	H2 valve opened
1/4/2011	10:15:41 AM	BCl3 valve opened
1/4/2011	10:15:41 AM	SiCl4 pre valve opened
1/4/2011	10:15:41 AM	SiCl4 post valve opened
1/4/2011	10:15:41 AM	Bubbler valve opened
1/4/2011	10:15:41 AM	Helium MFC set to  0.000000
1/4/2011	10:15:41 AM	H2 MFC set to  500.000000
1/4/2011	10:15:41 AM	BCl3 MFC set to  5.000000
1/4/2011	10:15:41 AM	PHl3 MFC set to  0.000000
1/4/2011	10:15:41 AM	SiCl4 MFC set to  50.000000
1/4/2011	10:15:41 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	10:15:41 AM	Tube furnace set to 1000
1/4/2011	10:30:41 AM	H2 valve closed
1/4/2011	10:30:41 AM	BCl3 valve closed
1/4/2011	10:30:41 AM	PH3 valve closed
1/4/2011	10:30:41 AM	SiCl4 pre valve closed
1/4/2011	10:30:41 AM	SiCl4 post valve closed
1/4/2011	10:30:41 AM	Main Vac valve closed
1/4/2011	10:30:41 AM	Bypass valve closed
1/4/2011	10:30:41 AM	Helium valve opened
1/4/2011	10:30:41 AM	Bubbler valve opened
1/4/2011	10:30:41 AM	Helium MFC set to  500.000000
1/4/2011	10:30:41 AM	H2 MFC set to  0.000000
1/4/2011	10:30:41 AM	BCl3 MFC set to  0.000000
1/4/2011	10:30:41 AM	PHl3 MFC set to  0.000000
1/4/2011	10:30:41 AM	SiCl4 MFC set to  0.000000
1/4/2011	10:30:41 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	10:30:41 AM	Tube furnace set to 0
1/4/2011	10:50:41 AM	Helium valve closed
1/4/2011	10:50:41 AM	H2 valve closed
1/4/2011	10:50:41 AM	BCl3 valve closed
1/4/2011	10:50:41 AM	PH3 valve closed
1/4/2011	10:50:41 AM	SiCl4 pre valve closed
1/4/2011	10:50:41 AM	SiCl4 post valve closed
1/4/2011	10:50:41 AM	Main Vac valve closed
1/4/2011	10:50:41 AM	Bypass valve closed
1/4/2011	10:50:41 AM	Bubbler valve closed
1/4/2011	10:50:41 AM	Helium MFC set to  0.000000
1/4/2011	10:50:41 AM	H2 MFC set to  0.000000
1/4/2011	10:50:41 AM	BCl3 MFC set to  0.000000
1/4/2011	10:50:41 AM	PHl3 MFC set to  0.000000
1/4/2011	10:50:41 AM	SiCl4 MFC set to  0.000000
1/4/2011	10:50:41 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	10:50:41 AM	Tube furnace set to 0
1/4/2011	10:50:41 AM	Run finished at 10:50 AM
1/4/2011	10:53:34 AM	Bypass valve opened
1/4/2011	10:53:59 AM	Main Vac valve opened
1/4/2011	11:08:00 AM	Main Vac valve closed
1/4/2011	11:08:00 AM	Bypass valve closed
1/4/2011	11:10:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2011	11:10:34 AM	Recipe started at 11:10 AM
1/4/2011	11:10:34 AM	Helium valve closed
1/4/2011	11:10:35 AM	H2 valve closed
1/4/2011	11:10:35 AM	BCl3 valve closed
1/4/2011	11:10:35 AM	PH3 valve closed
1/4/2011	11:10:35 AM	SiCl4 pre valve closed
1/4/2011	11:10:35 AM	SiCl4 post valve closed
1/4/2011	11:10:35 AM	Main Vac valve closed
1/4/2011	11:10:35 AM	Bubbler valve closed
1/4/2011	11:10:35 AM	Bypass valve opened
1/4/2011	11:10:35 AM	Helium MFC set to  0.000000
1/4/2011	11:10:35 AM	H2 MFC set to  0.000000
1/4/2011	11:10:35 AM	BCl3 MFC set to  0.000000
1/4/2011	11:10:35 AM	PHl3 MFC set to  0.000000
1/4/2011	11:10:35 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:10:35 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:10:35 AM	Tube furnace set to 0
1/4/2011	11:11:15 AM	Helium valve closed
1/4/2011	11:11:15 AM	H2 valve closed
1/4/2011	11:11:15 AM	BCl3 valve closed
1/4/2011	11:11:15 AM	PH3 valve closed
1/4/2011	11:11:15 AM	SiCl4 pre valve closed
1/4/2011	11:11:15 AM	SiCl4 post valve closed
1/4/2011	11:11:15 AM	Bubbler valve closed
1/4/2011	11:11:15 AM	Main Vac valve opened
1/4/2011	11:11:15 AM	Bypass valve opened
1/4/2011	11:11:15 AM	Helium MFC set to  0.000000
1/4/2011	11:11:15 AM	H2 MFC set to  0.000000
1/4/2011	11:11:15 AM	BCl3 MFC set to  0.000000
1/4/2011	11:11:15 AM	PHl3 MFC set to  0.000000
1/4/2011	11:11:15 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:11:15 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:11:15 AM	Tube furnace set to 0
1/4/2011	11:11:15 AM	Run finished at 11:11 AM
1/4/2011	11:11:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2011	11:11:59 AM	Bypass valve closed
1/4/2011	11:12:00 AM	Main Vac valve closed
1/4/2011	11:25:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2011	11:25:36 AM	Recipe started at 11:25 AM
1/4/2011	11:25:36 AM	Helium valve closed
1/4/2011	11:25:36 AM	H2 valve closed
1/4/2011	11:25:36 AM	BCl3 valve closed
1/4/2011	11:25:36 AM	PH3 valve closed
1/4/2011	11:25:36 AM	SiCl4 pre valve closed
1/4/2011	11:25:36 AM	SiCl4 post valve closed
1/4/2011	11:25:36 AM	Main Vac valve closed
1/4/2011	11:25:36 AM	Bubbler valve closed
1/4/2011	11:25:37 AM	Bypass valve opened
1/4/2011	11:25:37 AM	Helium MFC set to  0.000000
1/4/2011	11:25:37 AM	H2 MFC set to  0.000000
1/4/2011	11:25:37 AM	BCl3 MFC set to  0.000000
1/4/2011	11:25:37 AM	PHl3 MFC set to  0.000000
1/4/2011	11:25:37 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:25:37 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:25:37 AM	Tube furnace set to 0
1/4/2011	11:26:47 AM	Helium valve closed
1/4/2011	11:26:47 AM	H2 valve closed
1/4/2011	11:26:47 AM	BCl3 valve closed
1/4/2011	11:26:47 AM	PH3 valve closed
1/4/2011	11:26:47 AM	SiCl4 pre valve closed
1/4/2011	11:26:47 AM	SiCl4 post valve closed
1/4/2011	11:26:47 AM	Bubbler valve closed
1/4/2011	11:26:47 AM	Main Vac valve opened
1/4/2011	11:26:47 AM	Bypass valve opened
1/4/2011	11:26:47 AM	Helium MFC set to  0.000000
1/4/2011	11:26:47 AM	H2 MFC set to  0.000000
1/4/2011	11:26:47 AM	BCl3 MFC set to  0.000000
1/4/2011	11:26:47 AM	PHl3 MFC set to  0.000000
1/4/2011	11:26:47 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:26:47 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:26:47 AM	Tube furnace set to 0
1/4/2011	11:26:47 AM	Run finished at 11:26 AM
1/4/2011	11:26:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2011	11:27:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/4/2011	11:27:55 AM	Recipe started at 11:27 AM
1/4/2011	11:27:55 AM	Helium valve closed
1/4/2011	11:27:55 AM	H2 valve closed
1/4/2011	11:27:55 AM	BCl3 valve closed
1/4/2011	11:27:55 AM	PH3 valve closed
1/4/2011	11:27:55 AM	SiCl4 pre valve closed
1/4/2011	11:27:55 AM	SiCl4 post valve closed
1/4/2011	11:27:55 AM	Main Vac valve closed
1/4/2011	11:27:55 AM	Bypass valve closed
1/4/2011	11:27:55 AM	Bubbler valve closed
1/4/2011	11:27:55 AM	Helium MFC set to  0.000000
1/4/2011	11:27:55 AM	H2 MFC set to  0.000000
1/4/2011	11:27:55 AM	BCl3 MFC set to  0.000000
1/4/2011	11:27:55 AM	PHl3 MFC set to  0.000000
1/4/2011	11:27:55 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:27:55 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:27:55 AM	Tube furnace set to 0
1/4/2011	11:27:56 AM	Run finished at 11:27 AM
1/4/2011	11:27:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/4/2011	11:28:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2011	11:28:10 AM	Recipe started at 11:28 AM
1/4/2011	11:28:10 AM	Helium valve closed
1/4/2011	11:28:10 AM	H2 valve closed
1/4/2011	11:28:10 AM	BCl3 valve closed
1/4/2011	11:28:10 AM	PH3 valve closed
1/4/2011	11:28:10 AM	SiCl4 pre valve closed
1/4/2011	11:28:10 AM	SiCl4 post valve closed
1/4/2011	11:28:10 AM	Main Vac valve closed
1/4/2011	11:28:10 AM	Bubbler valve closed
1/4/2011	11:28:10 AM	Bypass valve opened
1/4/2011	11:28:10 AM	Helium MFC set to  0.000000
1/4/2011	11:28:10 AM	H2 MFC set to  0.000000
1/4/2011	11:28:10 AM	BCl3 MFC set to  0.000000
1/4/2011	11:28:10 AM	PHl3 MFC set to  0.000000
1/4/2011	11:28:10 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:28:10 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:28:10 AM	Tube furnace set to 0
1/4/2011	11:28:10 AM	Helium valve closed
1/4/2011	11:28:10 AM	H2 valve closed
1/4/2011	11:28:10 AM	BCl3 valve closed
1/4/2011	11:28:10 AM	PH3 valve closed
1/4/2011	11:28:10 AM	SiCl4 pre valve closed
1/4/2011	11:28:10 AM	SiCl4 post valve closed
1/4/2011	11:28:11 AM	Bubbler valve closed
1/4/2011	11:28:11 AM	Main Vac valve opened
1/4/2011	11:28:11 AM	Bypass valve opened
1/4/2011	11:28:11 AM	Helium MFC set to  0.000000
1/4/2011	11:28:11 AM	H2 MFC set to  0.000000
1/4/2011	11:28:11 AM	BCl3 MFC set to  0.000000
1/4/2011	11:28:11 AM	PHl3 MFC set to  0.000000
1/4/2011	11:28:11 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:28:11 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:28:11 AM	Tube furnace set to 0
1/4/2011	11:28:11 AM	Run finished at 11:28 AM
1/4/2011	11:28:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2011	11:31:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/4/2011	11:31:16 AM	Recipe started at 11:31 AM
1/4/2011	11:31:16 AM	Helium valve closed
1/4/2011	11:31:16 AM	H2 valve closed
1/4/2011	11:31:16 AM	BCl3 valve closed
1/4/2011	11:31:16 AM	PH3 valve closed
1/4/2011	11:31:16 AM	SiCl4 pre valve closed
1/4/2011	11:31:16 AM	SiCl4 post valve closed
1/4/2011	11:31:16 AM	Main Vac valve closed
1/4/2011	11:31:16 AM	Bypass valve closed
1/4/2011	11:31:16 AM	Bubbler valve closed
1/4/2011	11:31:16 AM	Helium MFC set to  0.000000
1/4/2011	11:31:16 AM	H2 MFC set to  0.000000
1/4/2011	11:31:16 AM	BCl3 MFC set to  0.000000
1/4/2011	11:31:16 AM	PHl3 MFC set to  0.000000
1/4/2011	11:31:16 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:31:16 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:31:16 AM	Tube furnace set to 0
1/4/2011	11:31:16 AM	Run finished at 11:31 AM
1/4/2011	11:31:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/4/2011	11:31:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/4/2011	11:31:42 AM	Recipe started at 11:31 AM
1/4/2011	11:31:42 AM	Helium valve closed
1/4/2011	11:31:42 AM	H2 valve closed
1/4/2011	11:31:42 AM	BCl3 valve closed
1/4/2011	11:31:42 AM	PH3 valve closed
1/4/2011	11:31:42 AM	SiCl4 pre valve closed
1/4/2011	11:31:42 AM	SiCl4 post valve closed
1/4/2011	11:31:42 AM	Main Vac valve closed
1/4/2011	11:31:42 AM	Bubbler valve closed
1/4/2011	11:31:42 AM	Bypass valve opened
1/4/2011	11:31:42 AM	Helium MFC set to  0.000000
1/4/2011	11:31:42 AM	H2 MFC set to  0.000000
1/4/2011	11:31:42 AM	BCl3 MFC set to  0.000000
1/4/2011	11:31:42 AM	PHl3 MFC set to  0.000000
1/4/2011	11:31:42 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:31:42 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:31:42 AM	Tube furnace set to 0
1/4/2011	11:31:43 AM	Helium valve closed
1/4/2011	11:31:43 AM	H2 valve closed
1/4/2011	11:31:43 AM	BCl3 valve closed
1/4/2011	11:31:43 AM	PH3 valve closed
1/4/2011	11:31:43 AM	SiCl4 pre valve closed
1/4/2011	11:31:43 AM	SiCl4 post valve closed
1/4/2011	11:31:43 AM	Bubbler valve closed
1/4/2011	11:31:43 AM	Main Vac valve opened
1/4/2011	11:31:43 AM	Bypass valve opened
1/4/2011	11:31:43 AM	Helium MFC set to  0.000000
1/4/2011	11:31:43 AM	H2 MFC set to  0.000000
1/4/2011	11:31:43 AM	BCl3 MFC set to  0.000000
1/4/2011	11:31:43 AM	PHl3 MFC set to  0.000000
1/4/2011	11:31:43 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:31:43 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:31:43 AM	Tube furnace set to 0
1/4/2011	11:32:43 AM	H2 valve closed
1/4/2011	11:32:43 AM	BCl3 valve closed
1/4/2011	11:32:43 AM	PH3 valve closed
1/4/2011	11:32:43 AM	SiCl4 pre valve closed
1/4/2011	11:32:43 AM	SiCl4 post valve closed
1/4/2011	11:32:43 AM	Bubbler valve closed
1/4/2011	11:32:43 AM	Helium valve opened
1/4/2011	11:32:43 AM	Main Vac valve opened
1/4/2011	11:32:43 AM	Bypass valve opened
1/4/2011	11:32:43 AM	Helium MFC set to  100.000000
1/4/2011	11:32:43 AM	H2 MFC set to  0.000000
1/4/2011	11:32:43 AM	BCl3 MFC set to  0.000000
1/4/2011	11:32:43 AM	PHl3 MFC set to  0.000000
1/4/2011	11:32:43 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:32:43 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:32:43 AM	Tube furnace set to 0
1/4/2011	11:33:43 AM	Helium valve closed
1/4/2011	11:33:43 AM	H2 valve closed
1/4/2011	11:33:43 AM	BCl3 valve closed
1/4/2011	11:33:43 AM	PH3 valve closed
1/4/2011	11:33:43 AM	SiCl4 pre valve closed
1/4/2011	11:33:43 AM	SiCl4 post valve closed
1/4/2011	11:33:43 AM	Bubbler valve closed
1/4/2011	11:33:43 AM	Main Vac valve opened
1/4/2011	11:33:43 AM	Bypass valve opened
1/4/2011	11:33:43 AM	Helium MFC set to  0.000000
1/4/2011	11:33:43 AM	H2 MFC set to  0.000000
1/4/2011	11:33:43 AM	BCl3 MFC set to  0.000000
1/4/2011	11:33:43 AM	PHl3 MFC set to  0.000000
1/4/2011	11:33:43 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:33:43 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:33:43 AM	Tube furnace set to 0
1/4/2011	11:34:43 AM	H2 valve closed
1/4/2011	11:34:43 AM	BCl3 valve closed
1/4/2011	11:34:43 AM	PH3 valve closed
1/4/2011	11:34:43 AM	SiCl4 pre valve closed
1/4/2011	11:34:43 AM	SiCl4 post valve closed
1/4/2011	11:34:43 AM	Bubbler valve closed
1/4/2011	11:34:43 AM	Helium valve opened
1/4/2011	11:34:43 AM	Main Vac valve opened
1/4/2011	11:34:43 AM	Bypass valve opened
1/4/2011	11:34:43 AM	Helium MFC set to  100.000000
1/4/2011	11:34:43 AM	H2 MFC set to  0.000000
1/4/2011	11:34:43 AM	BCl3 MFC set to  0.000000
1/4/2011	11:34:43 AM	PHl3 MFC set to  0.000000
1/4/2011	11:34:43 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:34:43 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:34:43 AM	Tube furnace set to 0
1/4/2011	11:35:43 AM	Helium valve closed
1/4/2011	11:35:43 AM	H2 valve closed
1/4/2011	11:35:43 AM	BCl3 valve closed
1/4/2011	11:35:43 AM	PH3 valve closed
1/4/2011	11:35:43 AM	SiCl4 pre valve closed
1/4/2011	11:35:43 AM	SiCl4 post valve closed
1/4/2011	11:35:43 AM	Bubbler valve closed
1/4/2011	11:35:43 AM	Main Vac valve opened
1/4/2011	11:35:43 AM	Bypass valve opened
1/4/2011	11:35:43 AM	Helium MFC set to  0.000000
1/4/2011	11:35:43 AM	H2 MFC set to  0.000000
1/4/2011	11:35:43 AM	BCl3 MFC set to  0.000000
1/4/2011	11:35:43 AM	PHl3 MFC set to  0.000000
1/4/2011	11:35:43 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:35:43 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:35:44 AM	Tube furnace set to 0
1/4/2011	11:36:44 AM	H2 valve closed
1/4/2011	11:36:44 AM	BCl3 valve closed
1/4/2011	11:36:44 AM	PH3 valve closed
1/4/2011	11:36:44 AM	SiCl4 pre valve closed
1/4/2011	11:36:44 AM	SiCl4 post valve closed
1/4/2011	11:36:44 AM	Bubbler valve closed
1/4/2011	11:36:44 AM	Helium valve opened
1/4/2011	11:36:44 AM	Main Vac valve opened
1/4/2011	11:36:44 AM	Bypass valve opened
1/4/2011	11:36:44 AM	Helium MFC set to  100.000000
1/4/2011	11:36:44 AM	H2 MFC set to  0.000000
1/4/2011	11:36:44 AM	BCl3 MFC set to  0.000000
1/4/2011	11:36:44 AM	PHl3 MFC set to  0.000000
1/4/2011	11:36:44 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:36:44 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:36:44 AM	Tube furnace set to 0
1/4/2011	11:37:44 AM	Helium valve closed
1/4/2011	11:37:44 AM	H2 valve closed
1/4/2011	11:37:44 AM	BCl3 valve closed
1/4/2011	11:37:44 AM	PH3 valve closed
1/4/2011	11:37:44 AM	SiCl4 pre valve closed
1/4/2011	11:37:44 AM	SiCl4 post valve closed
1/4/2011	11:37:44 AM	Bubbler valve closed
1/4/2011	11:37:44 AM	Main Vac valve opened
1/4/2011	11:37:44 AM	Bypass valve opened
1/4/2011	11:37:44 AM	Helium MFC set to  0.000000
1/4/2011	11:37:44 AM	H2 MFC set to  0.000000
1/4/2011	11:37:44 AM	BCl3 MFC set to  0.000000
1/4/2011	11:37:44 AM	PHl3 MFC set to  0.000000
1/4/2011	11:37:44 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:37:44 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:37:44 AM	Tube furnace set to 0
1/4/2011	11:38:44 AM	H2 valve closed
1/4/2011	11:38:44 AM	BCl3 valve closed
1/4/2011	11:38:44 AM	PH3 valve closed
1/4/2011	11:38:44 AM	SiCl4 pre valve closed
1/4/2011	11:38:44 AM	SiCl4 post valve closed
1/4/2011	11:38:44 AM	Bubbler valve closed
1/4/2011	11:38:44 AM	Helium valve opened
1/4/2011	11:38:44 AM	Main Vac valve opened
1/4/2011	11:38:44 AM	Bypass valve opened
1/4/2011	11:38:44 AM	Helium MFC set to  100.000000
1/4/2011	11:38:44 AM	H2 MFC set to  0.000000
1/4/2011	11:38:44 AM	BCl3 MFC set to  0.000000
1/4/2011	11:38:44 AM	PHl3 MFC set to  0.000000
1/4/2011	11:38:44 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:38:44 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:38:44 AM	Tube furnace set to 0
1/4/2011	11:39:44 AM	Helium valve closed
1/4/2011	11:39:44 AM	H2 valve closed
1/4/2011	11:39:44 AM	BCl3 valve closed
1/4/2011	11:39:44 AM	PH3 valve closed
1/4/2011	11:39:44 AM	SiCl4 pre valve closed
1/4/2011	11:39:44 AM	SiCl4 post valve closed
1/4/2011	11:39:44 AM	Bubbler valve closed
1/4/2011	11:39:44 AM	Main Vac valve opened
1/4/2011	11:39:44 AM	Bypass valve opened
1/4/2011	11:39:44 AM	Helium MFC set to  0.000000
1/4/2011	11:39:44 AM	H2 MFC set to  0.000000
1/4/2011	11:39:44 AM	BCl3 MFC set to  0.000000
1/4/2011	11:39:44 AM	PHl3 MFC set to  0.000000
1/4/2011	11:39:44 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:39:44 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:39:44 AM	Tube furnace set to 0
1/4/2011	11:40:44 AM	H2 valve closed
1/4/2011	11:40:44 AM	BCl3 valve closed
1/4/2011	11:40:44 AM	PH3 valve closed
1/4/2011	11:40:44 AM	SiCl4 pre valve closed
1/4/2011	11:40:44 AM	SiCl4 post valve closed
1/4/2011	11:40:44 AM	Bubbler valve closed
1/4/2011	11:40:44 AM	Helium valve opened
1/4/2011	11:40:44 AM	Main Vac valve opened
1/4/2011	11:40:44 AM	Bypass valve opened
1/4/2011	11:40:44 AM	Helium MFC set to  100.000000
1/4/2011	11:40:44 AM	H2 MFC set to  0.000000
1/4/2011	11:40:44 AM	BCl3 MFC set to  0.000000
1/4/2011	11:40:44 AM	PHl3 MFC set to  0.000000
1/4/2011	11:40:44 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:40:44 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:40:45 AM	Tube furnace set to 0
1/4/2011	11:41:45 AM	Helium valve closed
1/4/2011	11:41:45 AM	H2 valve closed
1/4/2011	11:41:45 AM	BCl3 valve closed
1/4/2011	11:41:45 AM	PH3 valve closed
1/4/2011	11:41:45 AM	SiCl4 pre valve closed
1/4/2011	11:41:45 AM	SiCl4 post valve closed
1/4/2011	11:41:45 AM	Bubbler valve closed
1/4/2011	11:41:45 AM	Main Vac valve opened
1/4/2011	11:41:45 AM	Bypass valve opened
1/4/2011	11:41:45 AM	Helium MFC set to  0.000000
1/4/2011	11:41:45 AM	H2 MFC set to  0.000000
1/4/2011	11:41:45 AM	BCl3 MFC set to  0.000000
1/4/2011	11:41:45 AM	PHl3 MFC set to  0.000000
1/4/2011	11:41:45 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:41:45 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:41:45 AM	Tube furnace set to 0
1/4/2011	11:42:45 AM	H2 valve closed
1/4/2011	11:42:45 AM	BCl3 valve closed
1/4/2011	11:42:45 AM	PH3 valve closed
1/4/2011	11:42:45 AM	SiCl4 pre valve closed
1/4/2011	11:42:45 AM	SiCl4 post valve closed
1/4/2011	11:42:45 AM	Bubbler valve closed
1/4/2011	11:42:45 AM	Helium valve opened
1/4/2011	11:42:45 AM	Main Vac valve opened
1/4/2011	11:42:45 AM	Bypass valve opened
1/4/2011	11:42:45 AM	Helium MFC set to  100.000000
1/4/2011	11:42:45 AM	H2 MFC set to  0.000000
1/4/2011	11:42:45 AM	BCl3 MFC set to  0.000000
1/4/2011	11:42:45 AM	PHl3 MFC set to  0.000000
1/4/2011	11:42:45 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:42:45 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:42:45 AM	Tube furnace set to 0
1/4/2011	11:43:45 AM	Helium valve closed
1/4/2011	11:43:45 AM	H2 valve closed
1/4/2011	11:43:45 AM	BCl3 valve closed
1/4/2011	11:43:45 AM	PH3 valve closed
1/4/2011	11:43:45 AM	SiCl4 pre valve closed
1/4/2011	11:43:45 AM	SiCl4 post valve closed
1/4/2011	11:43:45 AM	Bubbler valve closed
1/4/2011	11:43:45 AM	Main Vac valve opened
1/4/2011	11:43:45 AM	Bypass valve opened
1/4/2011	11:43:45 AM	Helium MFC set to  0.000000
1/4/2011	11:43:45 AM	H2 MFC set to  0.000000
1/4/2011	11:43:45 AM	BCl3 MFC set to  0.000000
1/4/2011	11:43:45 AM	PHl3 MFC set to  0.000000
1/4/2011	11:43:45 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:43:45 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:43:45 AM	Tube furnace set to 0
1/4/2011	11:44:45 AM	H2 valve closed
1/4/2011	11:44:45 AM	BCl3 valve closed
1/4/2011	11:44:45 AM	PH3 valve closed
1/4/2011	11:44:45 AM	SiCl4 pre valve closed
1/4/2011	11:44:45 AM	SiCl4 post valve closed
1/4/2011	11:44:45 AM	Bubbler valve closed
1/4/2011	11:44:45 AM	Helium valve opened
1/4/2011	11:44:45 AM	Main Vac valve opened
1/4/2011	11:44:45 AM	Bypass valve opened
1/4/2011	11:44:45 AM	Helium MFC set to  100.000000
1/4/2011	11:44:45 AM	H2 MFC set to  0.000000
1/4/2011	11:44:45 AM	BCl3 MFC set to  0.000000
1/4/2011	11:44:45 AM	PHl3 MFC set to  0.000000
1/4/2011	11:44:45 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:44:45 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:44:45 AM	Tube furnace set to 0
1/4/2011	11:45:45 AM	Helium valve closed
1/4/2011	11:45:45 AM	H2 valve closed
1/4/2011	11:45:45 AM	BCl3 valve closed
1/4/2011	11:45:45 AM	PH3 valve closed
1/4/2011	11:45:45 AM	SiCl4 pre valve closed
1/4/2011	11:45:45 AM	SiCl4 post valve closed
1/4/2011	11:45:45 AM	Bubbler valve closed
1/4/2011	11:45:45 AM	Main Vac valve opened
1/4/2011	11:45:45 AM	Bypass valve opened
1/4/2011	11:45:45 AM	Helium MFC set to  0.000000
1/4/2011	11:45:45 AM	H2 MFC set to  0.000000
1/4/2011	11:45:45 AM	BCl3 MFC set to  0.000000
1/4/2011	11:45:45 AM	PHl3 MFC set to  0.000000
1/4/2011	11:45:45 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:45:45 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:45:46 AM	Tube furnace set to 0
1/4/2011	11:46:46 AM	H2 valve closed
1/4/2011	11:46:46 AM	BCl3 valve closed
1/4/2011	11:46:46 AM	PH3 valve closed
1/4/2011	11:46:46 AM	SiCl4 pre valve closed
1/4/2011	11:46:46 AM	SiCl4 post valve closed
1/4/2011	11:46:46 AM	Bubbler valve closed
1/4/2011	11:46:46 AM	Helium valve opened
1/4/2011	11:46:46 AM	Main Vac valve opened
1/4/2011	11:46:46 AM	Bypass valve opened
1/4/2011	11:46:46 AM	Helium MFC set to  100.000000
1/4/2011	11:46:46 AM	H2 MFC set to  0.000000
1/4/2011	11:46:46 AM	BCl3 MFC set to  0.000000
1/4/2011	11:46:46 AM	PHl3 MFC set to  0.000000
1/4/2011	11:46:46 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:46:46 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:46:46 AM	Tube furnace set to 0
1/4/2011	11:47:46 AM	Helium valve closed
1/4/2011	11:47:46 AM	H2 valve closed
1/4/2011	11:47:46 AM	BCl3 valve closed
1/4/2011	11:47:46 AM	PH3 valve closed
1/4/2011	11:47:46 AM	SiCl4 pre valve closed
1/4/2011	11:47:46 AM	SiCl4 post valve closed
1/4/2011	11:47:46 AM	Bubbler valve closed
1/4/2011	11:47:46 AM	Main Vac valve opened
1/4/2011	11:47:46 AM	Bypass valve opened
1/4/2011	11:47:46 AM	Helium MFC set to  0.000000
1/4/2011	11:47:46 AM	H2 MFC set to  0.000000
1/4/2011	11:47:46 AM	BCl3 MFC set to  0.000000
1/4/2011	11:47:46 AM	PHl3 MFC set to  0.000000
1/4/2011	11:47:46 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:47:46 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:47:46 AM	Tube furnace set to 0
1/4/2011	11:48:46 AM	H2 valve closed
1/4/2011	11:48:46 AM	BCl3 valve closed
1/4/2011	11:48:46 AM	PH3 valve closed
1/4/2011	11:48:46 AM	SiCl4 pre valve closed
1/4/2011	11:48:46 AM	SiCl4 post valve closed
1/4/2011	11:48:46 AM	Bubbler valve closed
1/4/2011	11:48:46 AM	Helium valve opened
1/4/2011	11:48:46 AM	Main Vac valve opened
1/4/2011	11:48:46 AM	Bypass valve opened
1/4/2011	11:48:46 AM	Helium MFC set to  100.000000
1/4/2011	11:48:46 AM	H2 MFC set to  0.000000
1/4/2011	11:48:46 AM	BCl3 MFC set to  0.000000
1/4/2011	11:48:46 AM	PHl3 MFC set to  0.000000
1/4/2011	11:48:46 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:48:46 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:48:46 AM	Tube furnace set to 0
1/4/2011	11:49:46 AM	Helium valve closed
1/4/2011	11:49:46 AM	H2 valve closed
1/4/2011	11:49:46 AM	BCl3 valve closed
1/4/2011	11:49:46 AM	PH3 valve closed
1/4/2011	11:49:46 AM	SiCl4 pre valve closed
1/4/2011	11:49:46 AM	SiCl4 post valve closed
1/4/2011	11:49:46 AM	Bubbler valve closed
1/4/2011	11:49:46 AM	Main Vac valve opened
1/4/2011	11:49:46 AM	Bypass valve opened
1/4/2011	11:49:46 AM	Helium MFC set to  0.000000
1/4/2011	11:49:46 AM	H2 MFC set to  0.000000
1/4/2011	11:49:46 AM	BCl3 MFC set to  0.000000
1/4/2011	11:49:46 AM	PHl3 MFC set to  0.000000
1/4/2011	11:49:46 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:49:46 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:49:46 AM	Tube furnace set to 0
1/4/2011	11:50:46 AM	H2 valve closed
1/4/2011	11:50:46 AM	BCl3 valve closed
1/4/2011	11:50:46 AM	PH3 valve closed
1/4/2011	11:50:46 AM	SiCl4 pre valve closed
1/4/2011	11:50:46 AM	SiCl4 post valve closed
1/4/2011	11:50:46 AM	Bubbler valve closed
1/4/2011	11:50:46 AM	Helium valve opened
1/4/2011	11:50:46 AM	Main Vac valve opened
1/4/2011	11:50:46 AM	Bypass valve opened
1/4/2011	11:50:46 AM	Helium MFC set to  100.000000
1/4/2011	11:50:46 AM	H2 MFC set to  0.000000
1/4/2011	11:50:46 AM	BCl3 MFC set to  0.000000
1/4/2011	11:50:46 AM	PHl3 MFC set to  0.000000
1/4/2011	11:50:46 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:50:46 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:50:47 AM	Tube furnace set to 0
1/4/2011	11:51:47 AM	Helium valve closed
1/4/2011	11:51:47 AM	H2 valve closed
1/4/2011	11:51:47 AM	BCl3 valve closed
1/4/2011	11:51:47 AM	PH3 valve closed
1/4/2011	11:51:47 AM	SiCl4 pre valve closed
1/4/2011	11:51:47 AM	SiCl4 post valve closed
1/4/2011	11:51:47 AM	Bubbler valve closed
1/4/2011	11:51:47 AM	Main Vac valve opened
1/4/2011	11:51:47 AM	Bypass valve opened
1/4/2011	11:51:47 AM	Helium MFC set to  0.000000
1/4/2011	11:51:47 AM	H2 MFC set to  0.000000
1/4/2011	11:51:47 AM	BCl3 MFC set to  0.000000
1/4/2011	11:51:47 AM	PHl3 MFC set to  0.000000
1/4/2011	11:51:47 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:51:47 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:51:47 AM	Tube furnace set to 0
1/4/2011	11:51:48 AM	Run finished at 11:51 AM
1/4/2011	11:51:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/4/2011	11:54:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/4/2011	11:54:35 AM	Recipe started at 11:54 AM
1/4/2011	11:54:35 AM	Helium valve closed
1/4/2011	11:54:35 AM	H2 valve closed
1/4/2011	11:54:35 AM	BCl3 valve closed
1/4/2011	11:54:35 AM	PH3 valve closed
1/4/2011	11:54:35 AM	SiCl4 pre valve closed
1/4/2011	11:54:35 AM	SiCl4 post valve closed
1/4/2011	11:54:35 AM	Main Vac valve closed
1/4/2011	11:54:35 AM	Bypass valve closed
1/4/2011	11:54:35 AM	Bubbler valve closed
1/4/2011	11:54:35 AM	Helium MFC set to  0.000000
1/4/2011	11:54:35 AM	H2 MFC set to  0.000000
1/4/2011	11:54:35 AM	BCl3 MFC set to  0.000000
1/4/2011	11:54:35 AM	PHl3 MFC set to  0.000000
1/4/2011	11:54:35 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:54:35 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:54:36 AM	Tube furnace set to 0
1/4/2011	11:54:36 AM	Run finished at 11:54 AM
1/4/2011	11:54:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/4/2011	11:54:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2011	11:54:58 AM	Recipe started at 11:54 AM
1/4/2011	11:54:58 AM	Helium valve closed
1/4/2011	11:54:58 AM	H2 valve closed
1/4/2011	11:54:58 AM	BCl3 valve closed
1/4/2011	11:54:58 AM	PH3 valve closed
1/4/2011	11:54:58 AM	SiCl4 pre valve closed
1/4/2011	11:54:58 AM	SiCl4 post valve closed
1/4/2011	11:54:58 AM	Main Vac valve closed
1/4/2011	11:54:58 AM	Bubbler valve closed
1/4/2011	11:54:58 AM	Bypass valve opened
1/4/2011	11:54:58 AM	Helium MFC set to  0.000000
1/4/2011	11:54:58 AM	H2 MFC set to  0.000000
1/4/2011	11:54:58 AM	BCl3 MFC set to  0.000000
1/4/2011	11:54:58 AM	PHl3 MFC set to  0.000000
1/4/2011	11:54:58 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:54:58 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:54:58 AM	Tube furnace set to 0
1/4/2011	11:54:58 AM	Helium valve closed
1/4/2011	11:54:58 AM	H2 valve closed
1/4/2011	11:54:58 AM	BCl3 valve closed
1/4/2011	11:54:58 AM	PH3 valve closed
1/4/2011	11:54:58 AM	SiCl4 pre valve closed
1/4/2011	11:54:58 AM	SiCl4 post valve closed
1/4/2011	11:54:58 AM	Bubbler valve closed
1/4/2011	11:54:58 AM	Main Vac valve opened
1/4/2011	11:54:58 AM	Bypass valve opened
1/4/2011	11:54:58 AM	Helium MFC set to  0.000000
1/4/2011	11:54:58 AM	H2 MFC set to  0.000000
1/4/2011	11:54:58 AM	BCl3 MFC set to  0.000000
1/4/2011	11:54:58 AM	PHl3 MFC set to  0.000000
1/4/2011	11:54:58 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:54:58 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:54:59 AM	Tube furnace set to 0
1/4/2011	11:54:59 AM	Run finished at 11:54 AM
1/4/2011	11:54:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2011	11:59:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/4/2011	11:59:19 AM	Recipe started at 11:59 AM
1/4/2011	11:59:19 AM	Helium valve closed
1/4/2011	11:59:19 AM	H2 valve closed
1/4/2011	11:59:19 AM	BCl3 valve closed
1/4/2011	11:59:19 AM	PH3 valve closed
1/4/2011	11:59:19 AM	SiCl4 pre valve closed
1/4/2011	11:59:19 AM	SiCl4 post valve closed
1/4/2011	11:59:19 AM	Main Vac valve closed
1/4/2011	11:59:19 AM	Bubbler valve closed
1/4/2011	11:59:19 AM	Bypass valve opened
1/4/2011	11:59:19 AM	Helium MFC set to  0.000000
1/4/2011	11:59:19 AM	H2 MFC set to  0.000000
1/4/2011	11:59:19 AM	BCl3 MFC set to  0.000000
1/4/2011	11:59:19 AM	PHl3 MFC set to  0.000000
1/4/2011	11:59:19 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:59:19 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:59:19 AM	Tube furnace set to 0
1/4/2011	11:59:19 AM	Helium valve closed
1/4/2011	11:59:19 AM	H2 valve closed
1/4/2011	11:59:19 AM	BCl3 valve closed
1/4/2011	11:59:19 AM	PH3 valve closed
1/4/2011	11:59:19 AM	SiCl4 pre valve closed
1/4/2011	11:59:19 AM	SiCl4 post valve closed
1/4/2011	11:59:19 AM	Bubbler valve closed
1/4/2011	11:59:19 AM	Main Vac valve opened
1/4/2011	11:59:19 AM	Bypass valve opened
1/4/2011	11:59:19 AM	Helium MFC set to  0.000000
1/4/2011	11:59:19 AM	H2 MFC set to  0.000000
1/4/2011	11:59:19 AM	BCl3 MFC set to  0.000000
1/4/2011	11:59:19 AM	PHl3 MFC set to  0.000000
1/4/2011	11:59:19 AM	SiCl4 MFC set to  0.000000
1/4/2011	11:59:19 AM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:59:20 AM	Tube furnace set to 0
1/4/2011	12:00:20 PM	H2 valve closed
1/4/2011	12:00:20 PM	BCl3 valve closed
1/4/2011	12:00:20 PM	PH3 valve closed
1/4/2011	12:00:20 PM	SiCl4 pre valve closed
1/4/2011	12:00:20 PM	SiCl4 post valve closed
1/4/2011	12:00:20 PM	Bubbler valve closed
1/4/2011	12:00:20 PM	Helium valve opened
1/4/2011	12:00:20 PM	Main Vac valve opened
1/4/2011	12:00:20 PM	Bypass valve opened
1/4/2011	12:00:20 PM	Helium MFC set to  100.000000
1/4/2011	12:00:20 PM	H2 MFC set to  0.000000
1/4/2011	12:00:20 PM	BCl3 MFC set to  0.000000
1/4/2011	12:00:20 PM	PHl3 MFC set to  0.000000
1/4/2011	12:00:20 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:00:20 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:00:20 PM	Tube furnace set to 0
1/4/2011	12:01:20 PM	Helium valve closed
1/4/2011	12:01:20 PM	H2 valve closed
1/4/2011	12:01:20 PM	BCl3 valve closed
1/4/2011	12:01:20 PM	PH3 valve closed
1/4/2011	12:01:20 PM	SiCl4 pre valve closed
1/4/2011	12:01:20 PM	SiCl4 post valve closed
1/4/2011	12:01:20 PM	Bubbler valve closed
1/4/2011	12:01:20 PM	Main Vac valve opened
1/4/2011	12:01:20 PM	Bypass valve opened
1/4/2011	12:01:20 PM	Helium MFC set to  0.000000
1/4/2011	12:01:20 PM	H2 MFC set to  0.000000
1/4/2011	12:01:20 PM	BCl3 MFC set to  0.000000
1/4/2011	12:01:20 PM	PHl3 MFC set to  0.000000
1/4/2011	12:01:20 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:01:20 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:01:20 PM	Tube furnace set to 0
1/4/2011	12:02:20 PM	H2 valve closed
1/4/2011	12:02:20 PM	BCl3 valve closed
1/4/2011	12:02:20 PM	PH3 valve closed
1/4/2011	12:02:20 PM	SiCl4 pre valve closed
1/4/2011	12:02:20 PM	SiCl4 post valve closed
1/4/2011	12:02:20 PM	Bubbler valve closed
1/4/2011	12:02:20 PM	Helium valve opened
1/4/2011	12:02:20 PM	Main Vac valve opened
1/4/2011	12:02:20 PM	Bypass valve opened
1/4/2011	12:02:20 PM	Helium MFC set to  100.000000
1/4/2011	12:02:20 PM	H2 MFC set to  0.000000
1/4/2011	12:02:20 PM	BCl3 MFC set to  0.000000
1/4/2011	12:02:20 PM	PHl3 MFC set to  0.000000
1/4/2011	12:02:20 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:02:20 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:02:20 PM	Tube furnace set to 0
1/4/2011	12:03:20 PM	Helium valve closed
1/4/2011	12:03:20 PM	H2 valve closed
1/4/2011	12:03:20 PM	BCl3 valve closed
1/4/2011	12:03:20 PM	PH3 valve closed
1/4/2011	12:03:20 PM	SiCl4 pre valve closed
1/4/2011	12:03:20 PM	SiCl4 post valve closed
1/4/2011	12:03:20 PM	Bubbler valve closed
1/4/2011	12:03:20 PM	Main Vac valve opened
1/4/2011	12:03:20 PM	Bypass valve opened
1/4/2011	12:03:20 PM	Helium MFC set to  0.000000
1/4/2011	12:03:20 PM	H2 MFC set to  0.000000
1/4/2011	12:03:20 PM	BCl3 MFC set to  0.000000
1/4/2011	12:03:20 PM	PHl3 MFC set to  0.000000
1/4/2011	12:03:20 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:03:20 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:03:20 PM	Tube furnace set to 0
1/4/2011	12:04:20 PM	H2 valve closed
1/4/2011	12:04:20 PM	BCl3 valve closed
1/4/2011	12:04:20 PM	PH3 valve closed
1/4/2011	12:04:20 PM	SiCl4 pre valve closed
1/4/2011	12:04:20 PM	SiCl4 post valve closed
1/4/2011	12:04:20 PM	Bubbler valve closed
1/4/2011	12:04:20 PM	Helium valve opened
1/4/2011	12:04:20 PM	Main Vac valve opened
1/4/2011	12:04:20 PM	Bypass valve opened
1/4/2011	12:04:20 PM	Helium MFC set to  100.000000
1/4/2011	12:04:20 PM	H2 MFC set to  0.000000
1/4/2011	12:04:20 PM	BCl3 MFC set to  0.000000
1/4/2011	12:04:20 PM	PHl3 MFC set to  0.000000
1/4/2011	12:04:20 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:04:20 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:04:21 PM	Tube furnace set to 0
1/4/2011	12:05:21 PM	Helium valve closed
1/4/2011	12:05:21 PM	H2 valve closed
1/4/2011	12:05:21 PM	BCl3 valve closed
1/4/2011	12:05:21 PM	PH3 valve closed
1/4/2011	12:05:21 PM	SiCl4 pre valve closed
1/4/2011	12:05:21 PM	SiCl4 post valve closed
1/4/2011	12:05:21 PM	Bubbler valve closed
1/4/2011	12:05:21 PM	Main Vac valve opened
1/4/2011	12:05:21 PM	Bypass valve opened
1/4/2011	12:05:21 PM	Helium MFC set to  0.000000
1/4/2011	12:05:21 PM	H2 MFC set to  0.000000
1/4/2011	12:05:21 PM	BCl3 MFC set to  0.000000
1/4/2011	12:05:21 PM	PHl3 MFC set to  0.000000
1/4/2011	12:05:21 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:05:21 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:05:21 PM	Tube furnace set to 0
1/4/2011	12:06:21 PM	H2 valve closed
1/4/2011	12:06:21 PM	BCl3 valve closed
1/4/2011	12:06:21 PM	PH3 valve closed
1/4/2011	12:06:21 PM	SiCl4 pre valve closed
1/4/2011	12:06:21 PM	SiCl4 post valve closed
1/4/2011	12:06:21 PM	Bubbler valve closed
1/4/2011	12:06:21 PM	Helium valve opened
1/4/2011	12:06:21 PM	Main Vac valve opened
1/4/2011	12:06:21 PM	Bypass valve opened
1/4/2011	12:06:21 PM	Helium MFC set to  100.000000
1/4/2011	12:06:21 PM	H2 MFC set to  0.000000
1/4/2011	12:06:21 PM	BCl3 MFC set to  0.000000
1/4/2011	12:06:21 PM	PHl3 MFC set to  0.000000
1/4/2011	12:06:21 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:06:21 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:06:21 PM	Tube furnace set to 0
1/4/2011	12:07:21 PM	Helium valve closed
1/4/2011	12:07:21 PM	H2 valve closed
1/4/2011	12:07:21 PM	BCl3 valve closed
1/4/2011	12:07:21 PM	PH3 valve closed
1/4/2011	12:07:21 PM	SiCl4 pre valve closed
1/4/2011	12:07:21 PM	SiCl4 post valve closed
1/4/2011	12:07:21 PM	Bubbler valve closed
1/4/2011	12:07:21 PM	Main Vac valve opened
1/4/2011	12:07:21 PM	Bypass valve opened
1/4/2011	12:07:21 PM	Helium MFC set to  0.000000
1/4/2011	12:07:21 PM	H2 MFC set to  0.000000
1/4/2011	12:07:21 PM	BCl3 MFC set to  0.000000
1/4/2011	12:07:21 PM	PHl3 MFC set to  0.000000
1/4/2011	12:07:21 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:07:21 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:07:21 PM	Tube furnace set to 0
1/4/2011	12:08:21 PM	H2 valve closed
1/4/2011	12:08:21 PM	BCl3 valve closed
1/4/2011	12:08:21 PM	PH3 valve closed
1/4/2011	12:08:21 PM	SiCl4 pre valve closed
1/4/2011	12:08:21 PM	SiCl4 post valve closed
1/4/2011	12:08:21 PM	Bubbler valve closed
1/4/2011	12:08:21 PM	Helium valve opened
1/4/2011	12:08:21 PM	Main Vac valve opened
1/4/2011	12:08:21 PM	Bypass valve opened
1/4/2011	12:08:21 PM	Helium MFC set to  100.000000
1/4/2011	12:08:21 PM	H2 MFC set to  0.000000
1/4/2011	12:08:21 PM	BCl3 MFC set to  0.000000
1/4/2011	12:08:21 PM	PHl3 MFC set to  0.000000
1/4/2011	12:08:21 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:08:21 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:08:21 PM	Tube furnace set to 0
1/4/2011	12:09:21 PM	Helium valve closed
1/4/2011	12:09:21 PM	H2 valve closed
1/4/2011	12:09:21 PM	BCl3 valve closed
1/4/2011	12:09:21 PM	PH3 valve closed
1/4/2011	12:09:21 PM	SiCl4 pre valve closed
1/4/2011	12:09:21 PM	SiCl4 post valve closed
1/4/2011	12:09:21 PM	Bubbler valve closed
1/4/2011	12:09:21 PM	Main Vac valve opened
1/4/2011	12:09:21 PM	Bypass valve opened
1/4/2011	12:09:21 PM	Helium MFC set to  0.000000
1/4/2011	12:09:21 PM	H2 MFC set to  0.000000
1/4/2011	12:09:21 PM	BCl3 MFC set to  0.000000
1/4/2011	12:09:21 PM	PHl3 MFC set to  0.000000
1/4/2011	12:09:21 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:09:21 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:09:22 PM	Tube furnace set to 0
1/4/2011	12:10:22 PM	H2 valve closed
1/4/2011	12:10:22 PM	BCl3 valve closed
1/4/2011	12:10:22 PM	PH3 valve closed
1/4/2011	12:10:22 PM	SiCl4 pre valve closed
1/4/2011	12:10:22 PM	SiCl4 post valve closed
1/4/2011	12:10:22 PM	Bubbler valve closed
1/4/2011	12:10:22 PM	Helium valve opened
1/4/2011	12:10:22 PM	Main Vac valve opened
1/4/2011	12:10:22 PM	Bypass valve opened
1/4/2011	12:10:22 PM	Helium MFC set to  100.000000
1/4/2011	12:10:22 PM	H2 MFC set to  0.000000
1/4/2011	12:10:22 PM	BCl3 MFC set to  0.000000
1/4/2011	12:10:22 PM	PHl3 MFC set to  0.000000
1/4/2011	12:10:22 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:10:22 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:10:22 PM	Tube furnace set to 0
1/4/2011	12:11:22 PM	Helium valve closed
1/4/2011	12:11:22 PM	H2 valve closed
1/4/2011	12:11:22 PM	BCl3 valve closed
1/4/2011	12:11:22 PM	PH3 valve closed
1/4/2011	12:11:22 PM	SiCl4 pre valve closed
1/4/2011	12:11:22 PM	SiCl4 post valve closed
1/4/2011	12:11:22 PM	Bubbler valve closed
1/4/2011	12:11:22 PM	Main Vac valve opened
1/4/2011	12:11:22 PM	Bypass valve opened
1/4/2011	12:11:22 PM	Helium MFC set to  0.000000
1/4/2011	12:11:22 PM	H2 MFC set to  0.000000
1/4/2011	12:11:22 PM	BCl3 MFC set to  0.000000
1/4/2011	12:11:22 PM	PHl3 MFC set to  0.000000
1/4/2011	12:11:22 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:11:22 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:11:22 PM	Tube furnace set to 0
1/4/2011	12:12:22 PM	H2 valve closed
1/4/2011	12:12:22 PM	BCl3 valve closed
1/4/2011	12:12:22 PM	PH3 valve closed
1/4/2011	12:12:22 PM	SiCl4 pre valve closed
1/4/2011	12:12:22 PM	SiCl4 post valve closed
1/4/2011	12:12:22 PM	Bubbler valve closed
1/4/2011	12:12:22 PM	Helium valve opened
1/4/2011	12:12:22 PM	Main Vac valve opened
1/4/2011	12:12:22 PM	Bypass valve opened
1/4/2011	12:12:22 PM	Helium MFC set to  100.000000
1/4/2011	12:12:22 PM	H2 MFC set to  0.000000
1/4/2011	12:12:22 PM	BCl3 MFC set to  0.000000
1/4/2011	12:12:22 PM	PHl3 MFC set to  0.000000
1/4/2011	12:12:22 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:12:22 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:12:22 PM	Tube furnace set to 0
1/4/2011	12:13:22 PM	Helium valve closed
1/4/2011	12:13:22 PM	H2 valve closed
1/4/2011	12:13:22 PM	BCl3 valve closed
1/4/2011	12:13:22 PM	PH3 valve closed
1/4/2011	12:13:22 PM	SiCl4 pre valve closed
1/4/2011	12:13:22 PM	SiCl4 post valve closed
1/4/2011	12:13:22 PM	Bubbler valve closed
1/4/2011	12:13:22 PM	Main Vac valve opened
1/4/2011	12:13:22 PM	Bypass valve opened
1/4/2011	12:13:22 PM	Helium MFC set to  0.000000
1/4/2011	12:13:22 PM	H2 MFC set to  0.000000
1/4/2011	12:13:22 PM	BCl3 MFC set to  0.000000
1/4/2011	12:13:22 PM	PHl3 MFC set to  0.000000
1/4/2011	12:13:22 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:13:22 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:13:22 PM	Tube furnace set to 0
1/4/2011	12:14:22 PM	H2 valve closed
1/4/2011	12:14:22 PM	BCl3 valve closed
1/4/2011	12:14:22 PM	PH3 valve closed
1/4/2011	12:14:22 PM	SiCl4 pre valve closed
1/4/2011	12:14:22 PM	SiCl4 post valve closed
1/4/2011	12:14:22 PM	Bubbler valve closed
1/4/2011	12:14:22 PM	Helium valve opened
1/4/2011	12:14:22 PM	Main Vac valve opened
1/4/2011	12:14:22 PM	Bypass valve opened
1/4/2011	12:14:22 PM	Helium MFC set to  100.000000
1/4/2011	12:14:22 PM	H2 MFC set to  0.000000
1/4/2011	12:14:22 PM	BCl3 MFC set to  0.000000
1/4/2011	12:14:22 PM	PHl3 MFC set to  0.000000
1/4/2011	12:14:22 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:14:22 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:14:23 PM	Tube furnace set to 0
1/4/2011	12:15:23 PM	Helium valve closed
1/4/2011	12:15:23 PM	H2 valve closed
1/4/2011	12:15:23 PM	BCl3 valve closed
1/4/2011	12:15:23 PM	PH3 valve closed
1/4/2011	12:15:23 PM	SiCl4 pre valve closed
1/4/2011	12:15:23 PM	SiCl4 post valve closed
1/4/2011	12:15:23 PM	Bubbler valve closed
1/4/2011	12:15:23 PM	Main Vac valve opened
1/4/2011	12:15:23 PM	Bypass valve opened
1/4/2011	12:15:23 PM	Helium MFC set to  0.000000
1/4/2011	12:15:23 PM	H2 MFC set to  0.000000
1/4/2011	12:15:23 PM	BCl3 MFC set to  0.000000
1/4/2011	12:15:23 PM	PHl3 MFC set to  0.000000
1/4/2011	12:15:23 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:15:23 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:15:23 PM	Tube furnace set to 0
1/4/2011	12:16:23 PM	H2 valve closed
1/4/2011	12:16:23 PM	BCl3 valve closed
1/4/2011	12:16:23 PM	PH3 valve closed
1/4/2011	12:16:23 PM	SiCl4 pre valve closed
1/4/2011	12:16:23 PM	SiCl4 post valve closed
1/4/2011	12:16:23 PM	Bubbler valve closed
1/4/2011	12:16:23 PM	Helium valve opened
1/4/2011	12:16:23 PM	Main Vac valve opened
1/4/2011	12:16:23 PM	Bypass valve opened
1/4/2011	12:16:23 PM	Helium MFC set to  100.000000
1/4/2011	12:16:23 PM	H2 MFC set to  0.000000
1/4/2011	12:16:23 PM	BCl3 MFC set to  0.000000
1/4/2011	12:16:23 PM	PHl3 MFC set to  0.000000
1/4/2011	12:16:23 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:16:23 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:16:23 PM	Tube furnace set to 0
1/4/2011	12:17:23 PM	Helium valve closed
1/4/2011	12:17:23 PM	H2 valve closed
1/4/2011	12:17:23 PM	BCl3 valve closed
1/4/2011	12:17:23 PM	PH3 valve closed
1/4/2011	12:17:23 PM	SiCl4 pre valve closed
1/4/2011	12:17:23 PM	SiCl4 post valve closed
1/4/2011	12:17:23 PM	Bubbler valve closed
1/4/2011	12:17:23 PM	Main Vac valve opened
1/4/2011	12:17:23 PM	Bypass valve opened
1/4/2011	12:17:23 PM	Helium MFC set to  0.000000
1/4/2011	12:17:23 PM	H2 MFC set to  0.000000
1/4/2011	12:17:23 PM	BCl3 MFC set to  0.000000
1/4/2011	12:17:23 PM	PHl3 MFC set to  0.000000
1/4/2011	12:17:23 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:17:23 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:17:23 PM	Tube furnace set to 0
1/4/2011	12:18:23 PM	H2 valve closed
1/4/2011	12:18:23 PM	BCl3 valve closed
1/4/2011	12:18:23 PM	PH3 valve closed
1/4/2011	12:18:23 PM	SiCl4 pre valve closed
1/4/2011	12:18:23 PM	SiCl4 post valve closed
1/4/2011	12:18:23 PM	Bubbler valve closed
1/4/2011	12:18:23 PM	Helium valve opened
1/4/2011	12:18:23 PM	Main Vac valve opened
1/4/2011	12:18:23 PM	Bypass valve opened
1/4/2011	12:18:23 PM	Helium MFC set to  100.000000
1/4/2011	12:18:23 PM	H2 MFC set to  0.000000
1/4/2011	12:18:23 PM	BCl3 MFC set to  0.000000
1/4/2011	12:18:23 PM	PHl3 MFC set to  0.000000
1/4/2011	12:18:23 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:18:23 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:18:23 PM	Tube furnace set to 0
1/4/2011	12:19:23 PM	Helium valve closed
1/4/2011	12:19:23 PM	H2 valve closed
1/4/2011	12:19:23 PM	BCl3 valve closed
1/4/2011	12:19:23 PM	PH3 valve closed
1/4/2011	12:19:23 PM	SiCl4 pre valve closed
1/4/2011	12:19:23 PM	SiCl4 post valve closed
1/4/2011	12:19:23 PM	Bubbler valve closed
1/4/2011	12:19:23 PM	Main Vac valve opened
1/4/2011	12:19:23 PM	Bypass valve opened
1/4/2011	12:19:23 PM	Helium MFC set to  0.000000
1/4/2011	12:19:23 PM	H2 MFC set to  0.000000
1/4/2011	12:19:23 PM	BCl3 MFC set to  0.000000
1/4/2011	12:19:23 PM	PHl3 MFC set to  0.000000
1/4/2011	12:19:23 PM	SiCl4 MFC set to  0.000000
1/4/2011	12:19:23 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	12:19:24 PM	Tube furnace set to 0
1/4/2011	12:19:25 PM	Run finished at 12:19 PM
1/4/2011	12:19:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/4/2011	1:27:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/4/2011	1:27:06 PM	Recipe started at 1:27 PM
1/4/2011	1:27:06 PM	Helium valve closed
1/4/2011	1:27:06 PM	H2 valve closed
1/4/2011	1:27:06 PM	BCl3 valve closed
1/4/2011	1:27:06 PM	PH3 valve closed
1/4/2011	1:27:06 PM	SiCl4 pre valve closed
1/4/2011	1:27:07 PM	SiCl4 post valve closed
1/4/2011	1:27:07 PM	Main Vac valve closed
1/4/2011	1:27:07 PM	Bypass valve closed
1/4/2011	1:27:07 PM	Bubbler valve closed
1/4/2011	1:27:07 PM	Helium MFC set to  0.000000
1/4/2011	1:27:07 PM	H2 MFC set to  0.000000
1/4/2011	1:27:07 PM	BCl3 MFC set to  0.000000
1/4/2011	1:27:07 PM	PHl3 MFC set to  0.000000
1/4/2011	1:27:07 PM	SiCl4 MFC set to  0.000000
1/4/2011	1:27:07 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	1:27:07 PM	Tube furnace set to 0
1/4/2011	1:27:07 PM	Run finished at 1:27 PM
1/4/2011	1:27:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/4/2011	1:27:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2011	1:28:00 PM	Recipe started at 1:27 PM
1/4/2011	1:28:00 PM	Helium valve closed
1/4/2011	1:28:00 PM	H2 valve closed
1/4/2011	1:28:00 PM	BCl3 valve closed
1/4/2011	1:28:00 PM	PH3 valve closed
1/4/2011	1:28:00 PM	SiCl4 pre valve closed
1/4/2011	1:28:00 PM	SiCl4 post valve closed
1/4/2011	1:28:00 PM	Main Vac valve closed
1/4/2011	1:28:00 PM	Bubbler valve closed
1/4/2011	1:28:00 PM	Bypass valve opened
1/4/2011	1:28:00 PM	Helium MFC set to  0.000000
1/4/2011	1:28:00 PM	H2 MFC set to  0.000000
1/4/2011	1:28:00 PM	BCl3 MFC set to  0.000000
1/4/2011	1:28:00 PM	PHl3 MFC set to  0.000000
1/4/2011	1:28:00 PM	SiCl4 MFC set to  0.000000
1/4/2011	1:28:00 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	1:28:00 PM	Tube furnace set to 0
1/4/2011	1:28:00 PM	Helium valve closed
1/4/2011	1:28:00 PM	H2 valve closed
1/4/2011	1:28:00 PM	BCl3 valve closed
1/4/2011	1:28:00 PM	PH3 valve closed
1/4/2011	1:28:00 PM	SiCl4 pre valve closed
1/4/2011	1:28:00 PM	SiCl4 post valve closed
1/4/2011	1:28:00 PM	Bubbler valve closed
1/4/2011	1:28:00 PM	Main Vac valve opened
1/4/2011	1:28:00 PM	Bypass valve opened
1/4/2011	1:28:00 PM	Helium MFC set to  0.000000
1/4/2011	1:28:00 PM	H2 MFC set to  0.000000
1/4/2011	1:28:00 PM	BCl3 MFC set to  0.000000
1/4/2011	1:28:00 PM	PHl3 MFC set to  0.000000
1/4/2011	1:28:00 PM	SiCl4 MFC set to  0.000000
1/4/2011	1:28:00 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	1:28:00 PM	Tube furnace set to 0
1/4/2011	1:28:01 PM	Run finished at 1:28 PM
1/4/2011	1:28:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2011	1:29:07 PM	Recipe started at 1:29 PM
1/4/2011	1:29:07 PM	Helium valve closed
1/4/2011	1:29:07 PM	BCl3 valve closed
1/4/2011	1:29:07 PM	PH3 valve closed
1/4/2011	1:29:07 PM	SiCl4 pre valve closed
1/4/2011	1:29:07 PM	SiCl4 post valve closed
1/4/2011	1:29:07 PM	Main Vac valve closed
1/4/2011	1:29:07 PM	Bypass valve closed
1/4/2011	1:29:07 PM	Bubbler valve closed
1/4/2011	1:29:07 PM	H2 valve opened
1/4/2011	1:29:07 PM	Helium MFC set to  0.000000
1/4/2011	1:29:07 PM	H2 MFC set to  500.000000
1/4/2011	1:29:07 PM	BCl3 MFC set to  0.000000
1/4/2011	1:29:07 PM	PHl3 MFC set to  0.000000
1/4/2011	1:29:07 PM	SiCl4 MFC set to  0.000000
1/4/2011	1:29:07 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	1:29:08 PM	Tube furnace set to 0
1/4/2011	1:30:29 PM	Helium valve closed
1/4/2011	1:30:29 PM	BCl3 valve closed
1/4/2011	1:30:29 PM	PH3 valve closed
1/4/2011	1:30:29 PM	SiCl4 pre valve closed
1/4/2011	1:30:29 PM	SiCl4 post valve closed
1/4/2011	1:30:29 PM	Main Vac valve closed
1/4/2011	1:30:29 PM	Bypass valve closed
1/4/2011	1:30:29 PM	H2 valve opened
1/4/2011	1:30:29 PM	Bubbler valve opened
1/4/2011	1:30:29 PM	Helium MFC set to  0.000000
1/4/2011	1:30:29 PM	H2 MFC set to  500.000000
1/4/2011	1:30:29 PM	BCl3 MFC set to  0.000000
1/4/2011	1:30:29 PM	PHl3 MFC set to  0.000000
1/4/2011	1:30:29 PM	SiCl4 MFC set to  0.000000
1/4/2011	1:30:29 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	1:30:29 PM	Tube furnace set to 1000
1/4/2011	1:50:29 PM	Helium valve closed
1/4/2011	1:50:29 PM	PH3 valve closed
1/4/2011	1:50:29 PM	Main Vac valve closed
1/4/2011	1:50:29 PM	Bypass valve closed
1/4/2011	1:50:29 PM	H2 valve opened
1/4/2011	1:50:29 PM	BCl3 valve opened
1/4/2011	1:50:29 PM	SiCl4 pre valve opened
1/4/2011	1:50:29 PM	SiCl4 post valve opened
1/4/2011	1:50:29 PM	Bubbler valve opened
1/4/2011	1:50:29 PM	Helium MFC set to  0.000000
1/4/2011	1:50:29 PM	H2 MFC set to  500.000000
1/4/2011	1:50:29 PM	BCl3 MFC set to  3.000000
1/4/2011	1:50:29 PM	PHl3 MFC set to  0.000000
1/4/2011	1:50:29 PM	SiCl4 MFC set to  50.000000
1/4/2011	1:50:29 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	1:50:30 PM	Tube furnace set to 1000
1/4/2011	2:05:30 PM	H2 valve closed
1/4/2011	2:05:30 PM	BCl3 valve closed
1/4/2011	2:05:30 PM	PH3 valve closed
1/4/2011	2:05:30 PM	SiCl4 pre valve closed
1/4/2011	2:05:30 PM	SiCl4 post valve closed
1/4/2011	2:05:30 PM	Main Vac valve closed
1/4/2011	2:05:30 PM	Bypass valve closed
1/4/2011	2:05:30 PM	Helium valve opened
1/4/2011	2:05:30 PM	Bubbler valve opened
1/4/2011	2:05:30 PM	Helium MFC set to  500.000000
1/4/2011	2:05:30 PM	H2 MFC set to  0.000000
1/4/2011	2:05:30 PM	BCl3 MFC set to  0.000000
1/4/2011	2:05:30 PM	PHl3 MFC set to  0.000000
1/4/2011	2:05:30 PM	SiCl4 MFC set to  0.000000
1/4/2011	2:05:30 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	2:05:30 PM	Tube furnace set to 0
1/4/2011	2:25:30 PM	Helium valve closed
1/4/2011	2:25:30 PM	H2 valve closed
1/4/2011	2:25:30 PM	BCl3 valve closed
1/4/2011	2:25:30 PM	PH3 valve closed
1/4/2011	2:25:30 PM	SiCl4 pre valve closed
1/4/2011	2:25:30 PM	SiCl4 post valve closed
1/4/2011	2:25:30 PM	Main Vac valve closed
1/4/2011	2:25:30 PM	Bypass valve closed
1/4/2011	2:25:30 PM	Bubbler valve closed
1/4/2011	2:25:30 PM	Helium MFC set to  0.000000
1/4/2011	2:25:30 PM	H2 MFC set to  0.000000
1/4/2011	2:25:30 PM	BCl3 MFC set to  0.000000
1/4/2011	2:25:30 PM	PHl3 MFC set to  0.000000
1/4/2011	2:25:30 PM	SiCl4 MFC set to  0.000000
1/4/2011	2:25:30 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	2:25:30 PM	Tube furnace set to 0
1/4/2011	2:25:30 PM	Run finished at 2:25 PM
1/4/2011	2:29:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2011	2:29:27 PM	Recipe started at 2:29 PM
1/4/2011	2:29:27 PM	Helium valve closed
1/4/2011	2:29:27 PM	H2 valve closed
1/4/2011	2:29:27 PM	BCl3 valve closed
1/4/2011	2:29:27 PM	PH3 valve closed
1/4/2011	2:29:27 PM	SiCl4 pre valve closed
1/4/2011	2:29:27 PM	SiCl4 post valve closed
1/4/2011	2:29:27 PM	Main Vac valve closed
1/4/2011	2:29:27 PM	Bubbler valve closed
1/4/2011	2:29:27 PM	Bypass valve opened
1/4/2011	2:29:27 PM	Helium MFC set to  0.000000
1/4/2011	2:29:27 PM	H2 MFC set to  0.000000
1/4/2011	2:29:27 PM	BCl3 MFC set to  0.000000
1/4/2011	2:29:27 PM	PHl3 MFC set to  0.000000
1/4/2011	2:29:27 PM	SiCl4 MFC set to  0.000000
1/4/2011	2:29:27 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	2:29:27 PM	Tube furnace set to 0
1/4/2011	2:30:23 PM	Helium valve closed
1/4/2011	2:30:23 PM	H2 valve closed
1/4/2011	2:30:23 PM	BCl3 valve closed
1/4/2011	2:30:23 PM	PH3 valve closed
1/4/2011	2:30:23 PM	SiCl4 pre valve closed
1/4/2011	2:30:23 PM	SiCl4 post valve closed
1/4/2011	2:30:23 PM	Bubbler valve closed
1/4/2011	2:30:23 PM	Main Vac valve opened
1/4/2011	2:30:23 PM	Bypass valve opened
1/4/2011	2:30:23 PM	Helium MFC set to  0.000000
1/4/2011	2:30:23 PM	H2 MFC set to  0.000000
1/4/2011	2:30:23 PM	BCl3 MFC set to  0.000000
1/4/2011	2:30:23 PM	PHl3 MFC set to  0.000000
1/4/2011	2:30:23 PM	SiCl4 MFC set to  0.000000
1/4/2011	2:30:23 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	2:30:23 PM	Tube furnace set to 0
1/4/2011	2:30:23 PM	Run finished at 2:30 PM
1/4/2011	2:30:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2011	11:46:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/4/2011	11:46:31 PM	Recipe started at 11:46 PM
1/4/2011	11:46:31 PM	H2 valve closed
1/4/2011	11:46:31 PM	BCl3 valve closed
1/4/2011	11:46:31 PM	PH3 valve closed
1/4/2011	11:46:31 PM	SiCl4 pre valve closed
1/4/2011	11:46:31 PM	SiCl4 post valve closed
1/4/2011	11:46:31 PM	Main Vac valve closed
1/4/2011	11:46:31 PM	Bypass valve closed
1/4/2011	11:46:31 PM	Bubbler valve closed
1/4/2011	11:46:31 PM	Helium valve opened
1/4/2011	11:46:31 PM	Helium MFC set to  500.000000
1/4/2011	11:46:31 PM	H2 MFC set to  0.000000
1/4/2011	11:46:31 PM	BCl3 MFC set to  0.000000
1/4/2011	11:46:31 PM	PHl3 MFC set to  0.000000
1/4/2011	11:46:31 PM	SiCl4 MFC set to  0.000000
1/4/2011	11:46:31 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:46:31 PM	Tube furnace set to 0
1/4/2011	11:47:51 PM	Helium valve closed
1/4/2011	11:47:51 PM	H2 valve closed
1/4/2011	11:47:51 PM	BCl3 valve closed
1/4/2011	11:47:51 PM	PH3 valve closed
1/4/2011	11:47:51 PM	SiCl4 pre valve closed
1/4/2011	11:47:51 PM	SiCl4 post valve closed
1/4/2011	11:47:51 PM	Main Vac valve closed
1/4/2011	11:47:51 PM	Bypass valve closed
1/4/2011	11:47:51 PM	Bubbler valve closed
1/4/2011	11:47:51 PM	Helium MFC set to  0.000000
1/4/2011	11:47:51 PM	H2 MFC set to  0.000000
1/4/2011	11:47:51 PM	BCl3 MFC set to  0.000000
1/4/2011	11:47:51 PM	PHl3 MFC set to  0.000000
1/4/2011	11:47:51 PM	SiCl4 MFC set to  0.000000
1/4/2011	11:47:51 PM	Bypass solenoid MFC set to  0.000000
1/4/2011	11:47:51 PM	Tube furnace set to 0
1/4/2011	11:47:51 PM	Run finished at 11:47 PM
1/4/2011	11:47:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
